Substrate transport apparatus
A substrate transport apparatus including a frame, an upper arm rotatably mounted to the frame about a shoulder axis, a forearm rotatably mounted to the upper arm about an elbow axis where the forearm includes stacked forearm sections dependent from the upper arm through a common joint, and independent stacked end effectors rotatably mounted to the forearm, the forearm being common to the independent stacked end effectors, wherein at least one end effector is mounted to the stacked forearm sections at a wrist axis, where the forearm is configured such that spacing between the independent stacked end effectors mounted to the stacked forearm sections is decoupled from a height build up between end effectors accommodating pass through instrumentation.
1. A substrate transport apparatus comprising:
a frame;
an upper arm rotatably mounted to the frame about a shoulder axis;
a forearm rotatably mounted to the upper arm about an elbow axis where the forearm includes stacked forearm sections dependent from the upper arm through a common joint; and
independent stacked end effectors rotatably mounted to the forearm, the forearm being common to the independent stacked end effectors, wherein at least one end effector is mounted to the stacked forearm sections at a wrist axis;
where the forearm is configured such that spacing between the independent stacked end effectors mounted to the stacked forearm sections is decoupled from a mount stack up of other end effectors that accommodate pass through instrumentation within at least one of the other end effectors in the mount stack up.
2. The substrate transport apparatus of claim 1 , wherein the stacked forearm sections include an upper forearm section and a lower forearm section joined to each other by a connecting member so that the upper forearm section and lower forearm section form a one piece assembly unit.
3. The substrate transport apparatus of claim 2 , wherein at least one wafer center finding sensor is provided on the forearm where the at least one wafer center finding sensor is disposed to sense a substrate, held on the at least one end effector, that is passed between the upper and lower forearm section.
4. The substrate transport apparatus of claim 2 , wherein the at least one end effector further comprises a rotatable substrate holder and a substrate orientation detection sensor is disposed on one or more of the upper and lower forearm sections, the a substrate orientation detection sensor being configured to detect a substrate alignment feature of a substrate being held and rotated the rotatable substrate holder.
5. The substrate transport apparatus of claim 2 , wherein the at least one end effector is mounted to at least one of the upper forearm section and lower forearm section and disposed between the upper forearm section and lower forearm section.
6. The substrate transport apparatus of claim 2 , wherein the at least one end effector includes a first end effector rotatably mounted to the upper forearm section and a second end effector rotatable mounted to the lower forearm section where the first and second end effectors are arranged in an opposing relationship between the upper forearm section and lower forearm section.
7. The substrate transport apparatus of claim 6 , wherein the wrist axis is a common axis of rotation to both the first and second end effectors.
8. The substrate transport apparatus of claim 1 , wherein one of the stacked forearm sections forms a support member spaced apart from another one of the stacked forearm sections so as to form a pass through which the independent stacked end effectors rotate through.
9. The substrate transport apparatus of claim 8 , wherein at least one sensor is provided on one or more of the support member and the other one of the stacked forearm sections where the at least one sensor is disposed to sense a substrate, held on at least one end effector, that is rotated between the support member and the other one of the stacked forearm sections.
10. A substrate transport apparatus comprising:
a frame;
an upper arm rotatably mounted to the frame about a shoulder axis;
a forearm rotatably mounted to the upper arm about an elbow axis where the forearm includes stacked forearm sections dependent from the upper arm through a common joint; and
independent stacked end effectors rotatably mounted to the forearm, the forearm being common to the independent stacked end effectors, wherein at least one end effector is mounted to the stacked forearm sections at a wrist axis, each end effector having a wafer hold location so that the independent stacked end effectors form a wafer hold location stack;
wherein the forearm is configured so that a wafer hold location stack height is independent of a stack up height of an end effector accommodating pass through instrumentation.
11. The substrate transport apparatus of claim 10 , further comprising a drive section configured to provide Z motion to the independent stacked end effectors, where the wafer hold location stack height defines Z motion travel of the substrate transport apparatus effecting swapping of the independent stacked end effectors at a predetermined location.
12. The substrate transport apparatus of claim 10 , wherein the stacked forearm sections include an upper forearm section and a lower forearm section joined to each other by a connecting member so that the upper forearm section and lower forearm section form a one piece assembly unit.
13. The substrate transport apparatus of claim 12 , wherein at least one wafer center finding sensor is provided on the forearm where the at least one wafer center finding sensor is disposed to sense a substrate, held on the at least one end effector, that is passed between the upper and lower forearm section.
14. The substrate transport apparatus of claim 12 , wherein the at least one end effector further comprises a rotatable substrate holder and a substrate orientation detection sensor is disposed on one or more of the upper and lower forearm sections, the a substrate orientation detection sensor being configured to detect a substrate alignment feature of a substrate being held and rotated by the rotatable substrate holder.
15. The substrate transport apparatus of claim 12 , wherein the at least one end effector is configured so that the substrate held on the at least one end effector rotationally passes between to upper and lower forearm section.
16. The substrate transport apparatus of claim 12 , wherein at least one end effector is cantilevered from the connecting member so as to extend between the upper and lower forearm sections.
17. The substrate transport apparatus of claim 12 , wherein the at least one end effector is movably mounted to the connecting member so as to move in a direction substantially perpendicular to a plane of rotation of the at least one substrate holder.
18. The substrate transport apparatus of claim 10 , wherein one of the stacked forearm sections forms a support member spaced apart from another one of the stacked forearm sections so as to form a pass through which the independent stacked end effectors rotate through.
19. The substrate transport apparatus of claim 18 , wherein at least one sensor is provided on one or more of the support member and the other one of the stacked forearm sections where the at least one sensor is disposed to sense a substrate, held on at least one end effector, that is rotated between the support member and the other one of the stacked forearm sections.
20. A substrate transport apparatus comprising:
a frame;
an upper arm rotatably mounted to the frame about a shoulder axis;
a forearm rotatably mounted to the upper arm about an elbow axis where the forearm includes stacked forearm sections dependent from the upper arm through a common joint;
independent stacked end effectors rotatably mounted to the forearm, the forearm being common to the independent stacked end effectors, wherein at least one end effector is mounted to the stacked forearm sections at a wrist axis, each end effector having a wafer hold location so that the independent stacked end effectors form a wafer hold location stack, where the forearm is configured so that a wafer hold location stack height is independent of a stack up height of an end effector accommodating pass through instrumentation; and
a drive section configured to provide Z motion travel to the independent stacked end effectors and effect swapping between the independent stacked end effectors, wherein the substrate transport apparatus is configured to position the independent stacked end effectors at a predetermined location, wherein Z motion height effecting swapping between the independent stacked end effectors is decoupled from the stack up height of an end effector accommodating pass through instrumentation.
21. The substrate transport apparatus of claim 20 , wherein the Z motion height of the substrate transport apparatus effecting swapping of the independent stacked end effectors at a predetermined location is based on the wafer hold location stack height.
22. The substrate transport apparatus of claim 20 , wherein the stacked forearm sections include an upper forearm section and a lower forearm section joined to each other by a connecting member so that the upper forearm section and lower forearm section form a one piece assembly unit.
23. The substrate transport apparatus of claim 22 , wherein at least one wafer center finding sensor is provided on the forearm where the at least one wafer center finding sensor is disposed to sense a substrate, held on the at least one end effector, that is passed between the upper and lower forearm section.
24. The substrate transport apparatus of claim 22 , wherein the at least one end effector further comprises a rotatable substrate holder and a substrate orientation detection sensor is disposed on one or more of the upper and lower forearm sections, the a substrate orientation detection sensor being configured to detect a substrate alignment feature of a substrate being held and rotated by the rotatable substrate holder.
25. The substrate transport apparatus of claim 20 , wherein one of the stacked forearm sections forms a support member spaced apart from another one of the stacked forearm sections so as to form a pass through which the independent stacked end effectors rotate through.
26. The substrate transport apparatus of claim 25 , wherein at least one sensor is provided on one or more of the support member and the other one of the stacked forearm sections where the at least one sensor is disposed to sense a substrate, held on at least one end effector, that is rotated between the support member and the other one of the stacked forearm sections.
27. The substrate transport apparatus of claim 20 , further comprising a distributed drive section having drive motors disposed substantially about at least two of the shoulder axis, elbow axis and wrist axis for driving respective ones of the upper arm, forearm and at least one end effector.
28. The substrate transport apparatus of claim 20 , further comprising at least one coaxial drive shaft arrangement where each shaft in the coaxial drive shaft arrangement is drivingly coupled to a respective one of the upper arm, forearm and at least one end effector.
29. The substrate transport apparatus of claim 20 , further comprising end effector motors disposed in the forearm and offset from both of the elbow and wrist axes.