Dual scara arm
View Patent ↗A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
1. A substrate transport apparatus comprising:
a substantially rigid upper arm having a first upper arm section and a second upper arm section coupled to each other at a common axis of rotation by a releasable coupling to form the substantially rigid upper arm having opposing ends;
a first forearm rotatably coupled to a first one of the opposing ends;
a second forearm rotatably coupled to a second one of the opposing ends; and
at least one end effector rotatably coupled to each of the first forearm and second forearm, each of the at least one end effector being configured to hold at least one substrate;
wherein the releasable coupling is configured to change a size of an inclusive angle between the first upper arm section and the second upper arm section, where the inclusive angle is fixed for transporting substrates.
2. The substrate transport apparatus of claim 1 , wherein a length of the at least one end effector corresponds to the inclusive angle.
3. The substrate transport apparatus of claim 1 , wherein the releasable coupling comprises fixing holes disposed in mating surfaces of each of the first upper arm section and second upper arm section, the fixing holes being configured to provide incremental adjustment of the inclusive angle.
4. The substrate transport apparatus of claim 1 , wherein the releasable coupling defines the common axis of rotation.
5. The substrate transport apparatus of claim 1 , wherein the first upper arm section and the second arm section extend on opposite sides of the common axis of rotation.
6. The substrate transport apparatus of claim 1 , further comprising a drive section operably coupled to at least the upper arm and each of the first forearm and the second forearm.
7. The substrate transport apparatus of claim 6 , wherein the drive section defines an axis of rotation substantially collinear with the common axis of rotation, the upper arm being mounted to the drive section to rotate relative to the drive section about the common axis of rotation.
8. The substrate transport apparatus of claim 6 , wherein the drive section includes three drive axes for rotating respective ones of the upper arm, the first forearm and the second forearm.
9. A substrate transport apparatus comprising:
a substantially rigid upper arm having a first upper arm section and a second upper arm section coupled to each other at a common axis of rotation by a releasable coupling to form the substantially rigid upper arm having opposing ends;
a first forearm rotatably coupled to a first one of the opposing ends at a first elbow axis;
a second forearm rotatably coupled to a second one of the opposing ends at a second elbow axis; and
at least one end effector rotatably coupled to each of the first forearm and second forearm, each of the at least one end effector being configured to hold at least one substrate;
wherein the releasable coupling is configured to change a distance between the first elbow axis and the second elbow axis, where the distance between the first elbow axis and the second elbow axis is fixed for transporting substrates.
10. The substrate transport apparatus of claim 9 , wherein a length of the at least one end effector corresponds to the distance between the first elbow axis and the second elbow axis.
11. The substrate transport apparatus of claim 9 , wherein the releasable coupling comprises fixing holes disposed in mating surfaces of each of the first upper arm section and second upper arm section, the fixing holes being configured to provide incremental adjustment of the inclusive angle.
12. The substrate transport apparatus of claim 9 , wherein the releasable coupling defines the common axis of rotation.
13. The substrate transport apparatus of claim 9 , wherein the first upper arm section and the second arm section extend on opposite sides of the common axis of rotation.
14. The substrate transport apparatus of claim 9 , further comprising a drive section operably coupled to at least the upper arm and each of the first forearm and the second forearm.
15. The substrate transport apparatus of claim 14 , wherein the drive section defines an axis of rotation substantially collinear with the common axis of rotation, the upper arm being mounted to the drive section to rotate relative to the drive section about the common axis of rotation.
16. The substrate transport apparatus of claim 14 , wherein the drive section includes three drive axes for rotating respective ones of the upper arm, the first forearm and the second forearm.