A substrate loading station including a frame forming a chamber configured to hold a controlled environment, a transfer robot connected to the frame and one or more substrate cassette holding locations each capable of having a substrate cassette holder disposed within the frame. Each of the one or more substrate cassette holding locations being configured to removably support a respective substrate cassette in a predetermined position for communication with the transfer robot to effect substrate transfer between a respective cassette and the transfer robot where the one or more substrate cassette holding locations are configured to effect the interchangeability of one or more substrate cassette holders with other substrate cassette holders for changing a substrate cassette holding capacity of the substrate loading station.
1. A substrate loading station comprising:
a frame forming a chamber configured to hold a controlled environment;
a transfer robot connected to the frame; and
one or more substrate cassette holding locations disposed on the frame and each being configured so as to hold a substrate cassette holder disposed within the frame, each of the one or more substrate cassette holding locations defining an interchangeable substrate cassette interface, that is interchangeable with other different interchangeable substrate cassette interfaces disposed coincidentally with each other on the frame, each of interchangeable substrate cassette interface and the other different interchangeable substrate cassette interface being configured to removably interface with and support a different corresponding substrate cassette holder of a different predetermined size in a predetermined position for substrate cassette communication with the transfer robot, to effect substrate transfer between a respective cassette and the transfer robot, where the interchangeable substrate cassette interface and the other different interchangeable substrate cassette interfaces of the one or more substrate cassette holding locations are selectively disposed at the one or more substrate cassette holding locations to effect interchangeability of one or more substrate cassette holders of a predetermined size with other substrate cassette holders of a different predetermined size and changing a substrate cassette holding capacity of substrate cassettes simultaneously held by the substrate loading station from a first maximum number of substrate cassettes held within the frame to a different second maximum number of substrate cassettes held within the frame, the frame being common to both the first maximum number of substrate cassettes and the different second maximum number of substrate cassettes, so that the substrate cassette holding capacity of the common frame has an interchangeable first maximum number of substrate cassette holding locations and a different second maximum number of substrate cassette holding locations.
2. The substrate loading station of claim 1 , wherein each of the substrate cassette holding locations is disposed within the frame and configured to hold a respective substrate cassette so that the substrate cassette radially faces a central pivot axis of the transfer robot.
3. The substrate loading station of claim 1 , wherein each of the one or more substrate cassette holders is configured to hold a substrate cassette having a first size substrate therein and each of the other substrate cassette holders are configured to hold substrate cassettes having a second size substrate therein wherein the first size substrate has a different size than the second size substrate.
4. The substrate loading station of claim 1 , wherein the substrate loading station includes one or more levels of substrate cassette holding locations.
5. The substrate loading station of claim 4 , wherein the one or more levels are vertically stacked levels.
6. The substrate loading station of claim 4 , wherein the transfer robot is configured to access each of the substrate holding locations on each of the levels.
7. The substrate loading station of claim 1 , wherein the frame includes one or more doors corresponding to each of the substrate cassette holding locations wherein the substrate holding locations are configured to move between a loading position and a transfer robot access position depending on a position of a respective door.
8. The substrate loading station of claim 1 , wherein the substrate loading station is sized to fit within spatial dimensions specified in SEMI standards for a two-wide equipment front end module.
9. The substrate loading station of claim 1 , wherein each substrate cassette is configured to hold at least one substrate, the at least one substrate being for at least one of light emitting diode formation, organic light emitting diode formation and liquid crystal display formation.
10. A substrate processing tool comprising:
a substrate processing section; and
a substrate loading station communicably connected to the substrate processing section, the substrate loading station includes
a frame forming a chamber,
a transfer robot connected to the frame, and
one or more substrate cassette holding locations disposed on the frame and each being configured so as to hold a substrate cassette holder disposed within the frame, each of the one or more substrate cassette holding locations defining an interchangeable substrate cassette interface, that is interchangeable with other different interchangeable substrate cassette interfaces disposed coincidentally with each other on the frame, each of interchangeable substrate cassette interface and the other different interchangeable substrate cassette interface being configured to removably interface with and support a different corresponding substrate cassette holder of a different predetermined size in a predetermined position for substrate cassette communication with the transfer robot, to effect substrate transfer between a respective cassette and the transfer robot, where the interchangeable substrate cassette interface and the other different interchangeable substrate cassette interfaces of the one or more substrate cassette holding locations are selectively disposed at the one or more substrate cassette holding locations to effect interchangeability of one or more substrate cassette holders of a predetermined size with other substrate cassette holders of a different predetermined size and changing a substrate cassette holding capacity of substrate cassettes simultaneously held by the substrate loading station from a first maximum number of substrate cassettes held within the frame to a different second maximum number of substrate cassettes held within the frame, the frame being common to both the first maximum number of substrate cassettes and the different second maximum number of substrate cassettes, so that the substrate cassette holding capacity of the common frame has an interchangeable first maximum number of substrate cassette holding locations and a different second maximum number of substrate cassette holding locations.
11. The substrate processing tool of claim 10 , wherein each substrate cassette holder is configured to receive a substrate holding cassette from an automated material handling system.
12. The substrate processing tool of claim 10 , wherein each of one or more substrate cassette holders is configured to hold a substrate cassette having a first size substrate therein and each of the other substrate cassette holders are configured to hold substrate cassettes having a second size substrate therein wherein the first size substrate has a different size than the second size substrate.
13. The substrate processing tool of claim 10 , wherein each of the one or more substrate cassette holders and each of the one or more other cassette holders is disposed within the frame so as to be radially aligned with an axis of radial extension and retraction of the transfer robot.
14. The substrate processing tool of claim 10 , wherein the substrate loading station includes one or more levels of substrate cassette holding locations.
15. The substrate processing tool of claim 14 , wherein the one or more levels are vertically stacked levels.
16. The substrate processing tool of claim 14 , wherein the transfer robot is configured to access each of the substrate holding locations on each of the levels.
17. The substrate processing tool of claim 10 , wherein each substrate cassette is configured to hold at least one substrate, the at least one substrate being for at least one of light emitting diode formation, organic light emitting diode formation and liquid crystal display formation.
18. A substrate processing apparatus comprising:
a substrate loading station having a frame forming a chamber configured to hold a controlled environment; and
a substrate cassette holder, the substrate cassette holder having an interchangeable substrate cassette interface, that is interchangeable with other different interchangeable substrate cassette interfaces disposed coincidentally with each other on the frame, each of interchangeable substrate cassette interface and the other different interchangeable substrate cassette interface being configured for interfacing with and holding one or more different corresponding substrate cassettes, of a different predetermined size, in apposition for transfer of substrates from the one or more substrate cassettes by a substrate transfer robot where the substrate cassette holder defines a substrate cassette holding capacity with the interchangeable substrate cassette interface and the other different interchangeable substrate cassette interface that are selectively disposed at one or more substrate cassette holding locations of the substrate cassette holder so that the cassette holding capacity of the substrate holding station is interchangeably selectable upon selection of the selectable interchangeable features between a first maximum number of substrate holding locations and a second maximum number of substrate holding locations where the substrate cassette holder is common to the first maximum number of substrate holding locations and a second maximum number of substrate holding locations.
19. The substrate processing apparatus of claim 18 , wherein the selectable interchangeable substrate cassette interface and the other different interchangeable substrate cassette interfaces include one or more substrate cassette holder modules configured for removable attachment to the substrate cassette holder, at least one of the substrate cassette holder modules being configured to hold a substrate cassette having a first size substrate therein and at least one other substrate cassette holder module of the one or more substrate cassette holder modules being configured to hold a substrate cassette having a second size substrate therein wherein the first size substrate has a different size than the second size substrate.
20. The substrate processing apparatus of claim 18 , wherein each substrate cassette is configured to hold at least one substrate, the at least one substrate being for at least one of light emitting diode formation, organic light emitting diode formation and liquid crystal display formation.