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App. No. 14/517,900 · Confirmation No. 3554

Cleaning Systems and Methods for Semiconductor Substrate Storage Articles

Inventor: Lutz Rebstock
Applicant: Brooks CCS GmbH
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2015-11-28 PET.OP Petition for review by the Office of Petitions 2 View
2015-11-28 WFEE Fee Worksheet (SB06) 2 View
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2015-11-28 TRAN.LET Transmittal Letter 1 View
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2015-11-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-07-01 ABN Abandonment 2 View
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2015-03-24 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2015-03-24 WFEE Fee Worksheet (SB06) 2 View
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2015-03-24 XT/ Extension of Time 2 View
2015-01-15 PEFN Pre-Exam Formalities Notice 1 View
2015-01-15 PEFN Pre-Exam Formalities Notice 2 View
2015-01-08 R48.REQ Request under Rule 48 correcting inventorship 1 View
2015-01-08 ADS Application Data Sheet 6 View
2015-01-08 WFEE Fee Worksheet (SB06) 2 View
2015-01-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-01-07 WFEE Fee Worksheet (SB06) 1 View
2015-01-07 APP.FILE.REC Filing Receipt 3 View
2015-01-07 NT.INC.REPLY Notice of Incomplete Reply 2 View
2015-01-07 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2014-12-28 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2014-12-28 ADS Application Data Sheet 6 View
2014-12-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-10-29 WFEE Fee Worksheet (SB06) 1 View
2014-10-29 NTC.MISS.PRT Notice to File Missing Parts 2 View
2014-10-29 APP.FILE.REC Filing Receipt 3 View
2014-10-19 TRNA Transmittal of New Application 2 View
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2014-10-19 SPEC Specification 35 View
2014-10-19 CLM Claims 5 View
2014-10-19 ABST Abstract 1 View
2014-10-19 DRW.NONBW Drawings-other than black and white line drawings 25 View
2014-10-19 ADS Application Data Sheet 6 View
2014-10-19 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
0001-01-03 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
14/517,900
Filed
2014-10-19
Pub. No.
US20160303622A1
Art Unit
1711