IP Library › Patent Application 61894883
Patent Application Provisional
App. No. 61/894,883 · Confirmation No. 1240

Cleaning Systems and Methods for Semiconductor Substrate Storage Articles

Inventor: Lutz Rebstock
Provisional Application Expired
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2013-10-23 SPEC Specification 35 View
2013-10-23 CLM Claims 5 View
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Quick Facts
App. No.
61/894,883
Filed
2013-10-23