Unequal link SCARA arm
A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint. A proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint. The substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint. The upper arm and the forearm being unequal in length from joint center to joint center. The substrate transport arm is adapted to transport substrate to and from at least two substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the holding areas. Each of the upper arm, forearm and substrate holder being independently rotatable with respect to each other.
1. A method of transporting a substrate comprising:
providing a substrate transport apparatus with a drive section having a frame and a first, second and third drives;
providing an arm assembly having an independently rotatable upper arm and an independently rotatable forearm and an independently rotatable substrate holder for holding the substrate, the upper arm and forearm being of unequal length from joint center to joint center and rotatably joined to each other at a distal end of the upper arm, the upper arm being rotatably mounted to the frame at an opposite end, the substrate holder being rotatably joined to a distal end of the forearm at a wrist joint; and
energizing the first, second and third drives for effecting individual rotation of each of the upper arm, forearm and substrate holder, the individual rotation of each of the upper arm, forearm and substrate holder effecting movement of the substrate on the substrate holder along a radial line for transporting the substrate to and from a substrate holding area, the radial line being substantially perpendicular to the substrate holding area;
wherein the substrate holder rotates about a center of the substrate during radial movement of the substrate and relative rotation between the unequal length upper arm and forearm changes direction during extension to effect motion along the radial line.
2. The method of claim 1 , wherein the substrate holder rotates into a substrate holding area to pick/place a substrate.
3. The method of claim 1 , wherein the upper arm is shorter than the forearm.
4. The method of claim 1 , wherein a linear drive is drivingly connected to the arm assembly effecting translation of the substrate along a vertical axis.
5. The method of claim 1 , wherein the upper arm is drivingly connected to the first drive, the forearm is drivingly connected to the second drive and the substrate holder is drivingly connected to the third drive.
6. A substrate transport apparatus comprising:
a three link arm for selectably transporting substrates into three spaced inline substrate holding stations arranged side by side and facing the same direction, the three link arm having a substantially rigid upper arm rotatably coupled to a stationary drive section at a shoulder joint, a substantially rigid forearm rotatably coupled to the upper arm at an elbow joint and an end effector rotatably coupled to the forearm at a wrist joint;
wherein the wrist of the three link arm and a substrate held on the end effector of the three link arm travels along respective common parallel paths to each substrate holding station with the end effector aligned with the parallel paths and the shoulder joint of the three link arm is fixed relative to the holding stations, the upper arm and forearm being unequal in length from joint center to joint center so that with the upper arm, forearm and end effector of the substrate transport apparatus arranged in full extension, the substrate transport apparatus has a reach that is a maximum reach of the substrate transport apparatus for a predetermined swing diameter of the substrate transport apparatus with the upper arm, forearm and end effector in a retracted configuration.
7. The substrate transport apparatus of claim 6 , wherein the spacing between any two of the three substrate holding stations is substantially the same.
8. The substrate transport apparatus of claim 6 , wherein the drive section is fixed with the shoulder joint of the three link arm between end holding stations.
9. The substrate transport apparatus of claim 6 , wherein parallel paths to end holding stations straddle a shoulder joint of the three link arm.
10. The substrate transport apparatus of claim 6 , wherein when a substrate moves along transport path the substrate misses a SEMI exclusion area.
11. The substrate transport apparatus of claim 6 , wherein the spacing between holding areas conform to SEMI Standards.