Semiconductor material handling system
View Patent ↗The semiconductor material handling system is an EFEM that may either mount to the front end of a processing tool or be integrated into the processing tool. The EFEM is built from a unified frame that the EFEM components, such as a wafer engine and a SMIF pod advance plate, may mount to. The frame serves as a common mounting structure that the EFEM components may use as a reference for alignment purposes. Since the EFEM components do not have to align with respect to the position of each other, the calibration, if any is required, is greatly simplified. The EFEM also has a reduced footprint, allowing the EFEM to mount to the front end of a processing tool and not extend to the fab floor. Thus, space is freed up between the EFEM and the fab floor. By way of example only, this space may be used as a maintenance access area to the processing tool without having to first remove the EFEM.
1. An apparatus being adapted to receive and open a container having a mechanically openable door, comprising:
a frame including:
a first elongated structural member and a second elongated structural member, said first and second elongated structural members each having a front face, a rear face, a top portion and a bottom portion;
a structure secured to said bottom portion of said first and second elongated structural members, said structure having an exterior surface partially covering said front face of said first and second elongated structural members, an interior surface partially covering said rear face of said first and second elongated structural members;
a port door storage area located between said first and second elongated structural members, said exterior surface and said interior surface;
a container support assembly secured to said frame;
an isolation plate, having an opening, mounted to said first and second elongated struts; and
a port door movable between said opening in said isolation plate and said port door storage area.
2. The apparatus as recited in claim 1 , wherein said isolation plate may be removed from said frame without having to first remove said container support assembly.
3. The apparatus as recited in claim 1 , wherein said structure comprises a single piece of material.
4. The apparatus as recited in claim 1 , further including a workpiece engine for accessing workpieces stored in the container through said opening in said isolation plate.
5. The apparatus as recited in claim 4 , wherein said workpiece engine comprises:
an end effector;
means for moving said end effector between a retracted position and an extended position; and
an elevator having a vertical drive housing substantially enclosing a vertical drive mechanism for raising and lowering said means for moving said end effector between a retracted position and an extended position.
6. The apparatus as recited in claim 5 , wherein said vertical drive housing of said workpiece engine occupies a vertical elevation range in a clean environment substantially equal to the vertical elevation range said opening occupies in said isolation plate.
7. The apparatus as recited in claim 1 , further including a port door drive mechanism housing mounted to at least one of said first and second elongated structural members, said port door drive mechanism housing substantially enclosing a drive mechanism for moving said port door between said opening in said isolation plate and said port door storage area.
8. The apparatus as recited in claim 7 , wherein said port door drive mechanism housing includes a slot for air flow.
9. The apparatus as recited in claim 1 , wherein said port door is adapted to couple with the mechanically openable door of the container.
10. The apparatus as recited in claim 1 , wherein said container support provides position control of a container seated on said container support.
11. An apparatus able to receive and open a container having a mechanically openable door, comprising:
a frame including:
a first elongated structural member and a second elongated structural member, said first and second elongated structural members each having a first end and a second end; and
a support mounted to said second ends of said first and second elongated structural members;
a port door storage area;
a container support assembly secured to said frame;
an isolation plate detachably secured to said first and second elongated structural members, said isolation plate having an opening located at an elevation between said first and second ends of said first and second elongated structural members; and
a port door movable between said opening in said isolation plate and said port door storage area.
12. The apparatus as recited in claim 11 , further including a port door drive mechanism substantially enclosed in a port door drive mechanism housing secured to said frame, said port door drive mechanism for moving said port door between said opening and said port door storage area.
13. The apparatus as recited in claim 11 , wherein said container support assembly is adapted to control the position of a container seated on said container support assembly.
14. The apparatus as recited in claim 11 , wherein said port door is adapted to couple with the mechanically openable door of the container.
15. A workpiece handling tool for accessing workpieces stored in a container, comprising:
a frame having an upper support and a lower support, said lower support including a port door storage area;
a load port assembly secured to said frame;
an isolation plate mounted to said frame, said isolation plate having an opening located at an elevation between said upper support and said lower support;
a port door movable between said opening in said isolation plate and said port door storage area; and
a workpiece engine for accessing the workpieces stored in the container through said opening in said isolation plate.
16. The tool as recited in claim 15 , wherein at least one surface of said upper support or said lower support comprises a perforated surface.
17. The tool as recited in claim 15 , wherein said isolation plate may be removed from said frame without having to first remove said load port assembly or said workpiece engine.
18. The tool as recited in claim 15 , wherein said lower support comprises a single piece of material.
19. The tool as recited in claim 15 , wherein said load port assembly includes a container support, whereby a workpiece stored in an upper shelf of a container seated on said container support defines a first horizontal plane and a workpiece stored in a lower shelf of a container seated on said container support defines a second horizontal plane.
20. The tool as recited in claim 19 , wherein said workpiece engine comprises:
means for moving an end effector between a retracted position and an extended position;
an elevator having a vertical drive column, said elevator for vertically moving said means for moving an end effector between a retracted position and an extended position; and
said vertical drive column passing through at least said first horizontal plane or said second horizontal plane.
21. The tool as recited in claim 15 , wherein said load port assembly includes a container support.
22. The tool as recited in claim 21 , wherein said container support controls the position of a container seated on said container support.
23. A workpiece handling tool for accessing workpieces stored in a container seated on a container support, whereby a first horizontal plane is defined by the elevation of a workpiece stored in a top shelf of the seated container and a second horizontal plane is defined by the elevation of a workpiece stored in a bottom shelf of the seated container, comprising:
a frame;
a load port, including:
an isolation plate mounted to said frame, said isolation plate having an opening;
a port door;
a port door drive mechanism for moving said port door between an open position and a closed position, said port door drive mechanism substantially enclosed in a port door drive mechanism housing passing through at least said first horizontal plane or said second horizontal plane; and
a workpiece engine, including:
an end effector;
means for moving said end effector between a retracted position and an extended position; and
an elevator having a vertical drive housing substantially enclosing a vertical drive mechanism for, raising and lowering said means for moving said end effector between a retracted position and an extended position, said vertical drive housing passing through at least said first horizontal plane or said second horizontal plane.
24. The tool as recited in claim 23 , wherein said port door drive mechanism housing is mounted to said frame.
25. The tool as recited in claim 23 , wherein said frame further includes a port door storage area.
26. The tool as recited in claim 23 , wherein said isolation plate may be removed from said frame without having to first remove the container support or said workpiece engine.
27. A workpiece handling tool for accessing workpieces stored in a container seated on a container support, whereby a first horizontal plane is defined by the elevation of a workpiece stored in a top shelf of the seated container and a second horizontal plane is defined by the elevation of a workpiece stored in a bottom shelf of the seated container, comprising:
a frame;
an isolation plate mounted to said frame, said isolation plate having an opening;
a port door; and
a port door drive mechanism for moving said port door between an open position and a closed position, said port door drive mechanism substantially enclosed in a port door drive mechanism housing that passes through at least said first horizontal plane or said second horizontal plane.
28. The tool as recited in claim 27 , further including a workpiece engine comprising:
an end effector;
means for moving said end effector between a retracted position and an extended position; and
an elevator having a vertical drive housing substantially enclosing a drive mechanism for raising and lowering said means for moving said end effector between a retracted position and an extended position, said vertical drive housing passing through at least said first horizontal plane or said second horizontal plane.
29. The tool as recited in claim 27 , wherein said port door drive mechanism housing is mounted to said frame.
30. The tool as recited in claim 27 , wherein said frame includes a port door storage area.
31. The tool as recited in claim 30 , wherein said port door drive mechanism moves said port door between said opening in said isolation plate and said port door storage area.
32. A workpiece handling tool for accessing workpieces stored in a container seated on a container support, whereby a first horizontal plane is defined by the elevation of a workpiece stored in a top shelf of the seated container and a second horizontal plane is defined by the elevation of a workpiece stored in a bottom shelf of the seated container, comprising:
a frame;
an isolation plate mounted to said frame, said isolation plate having an opening;
a port door; and
a workpiece engine, comprising:
an end effector;
means for moving said end effector between a retracted position and an extended position; and
an elevator having a vertical drive housing substantially enclosing a drive mechanism for raising and lowering said means for moving said end effector between a retracted position and an extended position, said vertical drive housing passing through at least said first horizontal plane or said second horizontal plane.
33. The tool as recited in claim 32 , further including a port door drive mechanism for moving said port door between an open position and a closed position.
34. The tool as recited in claim 33 , wherein said port door drive mechanism is substantially enclosed in a port door drive mechanism housing that passes through at least said first horizontal plane or said second horizontal plane.
35. The tool as recited in claim 34 , wherein said port door drive mechanism housing contains an air-flow slot.
36. The tool as recited in claim 32 , wherein said port door is adapted to couple with a door of the container.
37. The tool as recited in claim 32 , wherein said frame includes a port door storage area.
38. The tool as recited in claim 32 , wherein said workpiece engine accesses the workpieces stored in the seated container through said opening in said isolation plate.