Patent Assignment
Reel/Frame 018303/0969
Security Agreement
Recorded: 2006-09-27
Received: 2006-09-27
Pages: 22
Assignee
BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
800 FIFTH AVENUE, FLOOR 32, SEATTLE, WA, 98104, UNITED STATES
Covered Properties
(36)
Unified frame for semiconductor material handling system
Application:
11/352,154 →
Multi-protocol multi-client equipment server
Application:
11/340,101 →
Wafer Engine
Application:
11/305,256 →
Horizontal array stocker
Application:
60/730,688 →
Discontinuous Conveyor System
Application:
11/238,030 →
Belt conveyor for use with semiconductor containers
Application:
60/698,124 →
Interface Between Conveyor and Semiconductor Process Tool Load Port
Application:
11/178,072 →
Direct Tool Loading
Application:
11/177,645 →
Stocker and controls for use with conveyor
Application:
60/697,616 →
Integrated terminal for high speed AMHS
Application:
60/681,389 →
Automated Job Management
Application:
11/107,508 →
Direct Tool Loading
Application:
11/064,880 →
Active Edge Grip Rest Pad
Application:
11/014,401 →
Ultra Low Contact Area End Effector
Application:
10/888,819 →
Distributed control system architecture and method for a material transport system
Application:
10/719,069 →
Active Edge Gripping End Effector
Application:
10/624,133 →
Data collection and diagnostic system for a semiconductor fabrication facility
Application:
10/618,313 →
Edge Grip Aligner with Buffering Capabilities
Application:
10/444,327 →
Pre-Aligner
Application:
10/438,470 →
Wafer aligner
Application:
10/237,078 →
Universal Modular Wafer Transport System
Application:
10/234,640 →
Method and Apparatus for Automating a Microelectronic Manufacturing Process
Application:
10/222,380 →
Integrated System for Tool Front-End Workpiece Handling
Application:
10/194,702 →
Integrated Transport Carrier and Conveyor System
Application:
10/123,850 →
Wafer Engine
Application:
10/087,400 →
Unified Frame for Semiconductor Material Handling System
Application:
10/087,638 →
Semiconductor Material Handling System
Application:
10/087,092 →
Edge Grip Aligner with Buffering Capabilities
Application:
09/943,555 →
Clean Method for Vacuum Holding of Substrates
Application:
09/905,490 →
Smif Load Port Interface Including Smart Port Door
Application:
09/905,339 →
Automated Tool Management in a Multi-Protocol Environment
Application:
09/899,833 →
Intelligent Minienvironment
Application:
09/873,691 →
Distributed Control System Architecture and Method for a Material Transport System
Application:
09/825,619 →
Integrated Roller Transport Pod and Asynchronous Conveyor
Application:
09/781,060 →
System for Safeguarding Integrated Intrabay Pod Delivery and Storage System
Application:
09/776,227 →
Workpiece Sorter Operating with Modular Bare Workpiece Stockers and/or Closed Container Stockers
Application:
09/760,147 →