IP Library › Patent Application 10618313
Patent Application Utility
App. No. 10/618,313 · Confirmation No. 4770

Data collection and diagnostic system for a semiconductor fabrication facility

Abandoned -- Failure to Respond to an Office Action View Publication ↗
⬇ PDF
 Code Description Pages PDF
2008-09-25 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-09-25 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-09-08 PA.. Power of Attorney 2 View
2008-08-06 ABN Abandonment 3 View
2007-12-28 CTNF Non-Final Rejection 8 View
2007-12-28 892 List of references cited by examiner 1 View
2007-12-28 FWCLM Index of Claims 1 View
2007-12-28 SRFW Search information including classification, databases and other search related notes 1 View
2007-12-14 SRNT Examiner's search strategy and results 3 View
2007-09-18 RCEX Request for Continued Examination (RCE) 1 View
2007-09-18 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2007-09-18 CLM Claims 3 View
2007-09-18 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2007-09-18 WFEE Fee Worksheet (SB06) 1 View
2007-04-10 NRES Letter Restarting Period for Response (i.e. Letter re: References) 12 View
2007-03-20 PET.DEC.TC Petition decision routed to the Technology Center to act on the decision or continue prosecution 2 View
2006-08-28 PET.OP Petition for review by the Office of Petitions 44 View
2006-07-26 ABN Abandonment 2 View
2006-07-26 EXIN Examiner Interview Summary Record (PTOL - 413) 1 View
2006-01-20 CTFR Final Rejection 12 View
2006-01-20 FWCLM Index of Claims 1 View
2005-11-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-11-14 CLM Claims 4 View
2005-11-14 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2005-11-14 NDRW Transmittal Letter accompanying New/Additional Drawings 1 View
2005-11-14 LET. Miscellaneous Incoming Letter 1 View
2005-11-14 XT/ Extension of Time 1 View
2005-11-14 WFEE Fee Worksheet (SB06) 1 View
2005-06-30 CTNF Non-Final Rejection 11 View
2005-06-30 892 List of references cited by examiner 1 View
2005-06-30 BIB Bibliographic Data Sheet 1 View
2005-06-30 SRFW Search information including classification, databases and other search related notes 1 View
2005-06-30 FWCLM Index of Claims 1 View
2005-06-24 SRNT Examiner's search strategy and results 4 View
2004-05-28 CFILE Request for Corrected Filing Receipt 3 View
2004-02-09 OATH Oath or Declaration filed 6 View
2004-02-09 DRW Drawings-only black and white line drawings 6 View
2004-02-09 XT/ Extension of Time 1 View
2004-02-09 CFILE Request for Corrected Filing Receipt 2 View
2003-10-10 PEFN Pre-Exam Formalities Notice 3 View
2003-07-10 136A Authorization for Extension of Time all replies 2 View
2003-07-10 SPEC Specification 18 View
2003-07-10 CLM Claims 4 View
2003-07-10 ABST Abstract 1 View
2003-07-10 DRW Drawings-only black and white line drawings 6 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
10/618,313
Filed
2003-07-10
Pub. No.
US20050010311A1
Art Unit
2121