Patent Assignment
Reel/Frame 019699/0165
Security Agreement
Recorded: 2007-08-15
Received: 2007-08-15
Pages: 82
Assignor
ASYST TECHNOLOGIES, INC.
Executed: 2007-07-27
Assignee
KEYBANK NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
127 PUBLIC SQUARE, CLEVELAND, OH, 44114, UNITED STATES
Covered Properties
(48)
Loader and buffer for reduced lot size
Application:
11/644,240 →
Environmental isolation system for flat panel displays
Application:
60/873,892 →
Variable pitch storage shelves
Application:
11/603,714 →
Load port door with simplified FOUP door sensing and retaining mechanism
Application:
11/599,020 →
Series impendence matched inductive power pickup system
Application:
60/847,630 →
Vertical wafer AMHS and EFEM
Application:
60/819,979 →
Belt Conveyor for Use with Semiconductor Containers
Application:
11/484,218 →
Workpiece support structures and apparatus for accessing same
Application:
11/483,366 →
Stocker for Optimizing Container Movement
Application:
11/482,650 →
Method for transporting, queuing, and loading of large area substrates in multi-tool processing operations
Application:
60/815,890 →
Extended Read Range Rfid System
Application:
11/449,084 →
Modular Terminal for High-Throughput Amhs
Application:
11/433,980 →
Unified frame for semiconductor material handling system
Application:
11/352,154 →
Multi-protocol multi-client equipment server
Application:
11/340,101 →
Wafer Engine
Application:
11/305,256 →
Horizontal array stocker
Application:
60/730,688 →
Discontinuous Conveyor System
Application:
11/238,030 →
Belt conveyor for use with semiconductor containers
Application:
60/698,124 →
Interface Between Conveyor and Semiconductor Process Tool Load Port
Application:
11/178,072 →
Direct Tool Loading
Application:
11/177,645 →
Stocker and controls for use with conveyor
Application:
60/697,616 →
Integrated terminal for high speed AMHS
Application:
60/681,389 →
Automated Job Management
Application:
11/107,508 →
Direct Tool Loading
Application:
11/064,880 →
Active Edge Grip Rest Pad
Application:
11/014,401 →
Ultra Low Contact Area End Effector
Application:
10/888,819 →
Distributed control system architecture and method for a material transport system
Application:
10/719,069 →
Active Edge Gripping End Effector
Application:
10/624,133 →
Data collection and diagnostic system for a semiconductor fabrication facility
Application:
10/618,313 →
Edge Grip Aligner with Buffering Capabilities
Application:
10/444,327 →
Pre-Aligner
Application:
10/438,470 →
Universal Modular Wafer Transport System
Application:
10/234,640 →
Method and Apparatus for Automating a Microelectronic Manufacturing Process
Application:
10/222,380 →
Integrated System for Tool Front-End Workpiece Handling
Application:
10/194,702 →
Integrated Transport Carrier and Conveyor System
Application:
10/123,850 →
Wafer Engine
Application:
10/087,400 →
Unified Frame for Semiconductor Material Handling System
Application:
10/087,638 →
Semiconductor Material Handling System
Application:
10/087,092 →
Edge Grip Aligner with Buffering Capabilities
Application:
09/943,555 →
Clean Method for Vacuum Holding of Substrates
Application:
09/905,490 →
Smif Load Port Interface Including Smart Port Door
Application:
09/905,339 →
Automated Tool Management in a Multi-Protocol Environment
Application:
09/899,833 →
Intelligent Minienvironment
Application:
09/873,691 →
Distributed Control System Architecture and Method for a Material Transport System
Application:
09/825,619 →
Integrated Roller Transport Pod and Asynchronous Conveyor
Application:
09/781,060 →
System for Safeguarding Integrated Intrabay Pod Delivery and Storage System
Application:
09/776,227 →
Method and System for Improved Per-Pixel Shading in a Computer Graphics System
Application:
09/766,227 →
Workpiece Sorter Operating with Modular Bare Workpiece Stockers and/or Closed Container Stockers
Application:
09/760,147 →