Loader and buffer for reduced lot size
View Patent ↗A system comprising a load port and a transfer module. In one embodiment, the load port includes a plate having a first opening and a second opening, a first workpiece access port, a second workpiece access port and at least one storage location. The storage location(s) may be located either beneath the second workpiece access port or above the first workpiece access port. The transfer mosule, which is located adjacent the load port, includes a load arm for moving the workpiece containers between the first workpiece access port, the second workpiece access port, any of the storage shelves and a material transport system.
1. A system for storing and accessing semiconductor wafers for interfacing with a processing tool, comprising:
a load port defined by a first plate having an access port defined therein, the first plate of the load port being securable to the processing tool;
a first container support location defined at the access port, said access port enabling transfers of semiconductor wafers between the first container support location and the processing tool;
a second container support location defined above and vertically aligned with the first container support location;
a third container support location defined below and vertically aligned with the first container support location; and
a transfer module defined by a second plate distinct from the first plate and a container transport mechanism operably coupled to the second plate, the second plate including a track, the container transport mechanism configured to move vertically along the track, the second plate of the transfer module being securable to the processing tool at a location that is adjacent to the first plate on either a left adjacent side or a right adjacent side of the first plate, and wherein the transfer module is configured for moving containers among the first, second and third container support locations;
wherein the load port and the transfer module are each independently detachable from the processing tool;
wherein the first plate defines a width to accommodate only a single column of vertically aligned container support locations; and
wherein the second plate defines a width substantially similar to the width defined by the first plate;
wherein said first plate and said second plate conform to a Box Opener/Loader to Tool Standard Interface.
2. The system as recited in claim 1 , wherein said first access location includes:
a container advance plate for supporting a container and moving the container between a first position and a second position; and
a port door for controlling access through said access port in said first plate.
3. The system as recited in claim 1 , wherein said container transport mechanism is configured to engage each container at a top handle.
4. The system as recited in claim 1 , wherein the track is along a Z travel zone.
5. The system as recited in claim 1 , wherein said transfer module includes:
the second plate; and
the container transport mechanism, including:
a carriage able to move vertically along the track;
an upper link arm having a first end and a second end, said first end rotatably coupled with said carriage;
a lower link arm having a first end and a second end, said first end rotatably coupled with said second end of said upper link arm; and
a gripper rotatably coupled with said second end of said lower link arm.
6. The system as recited in claim 1 , wherein the container is configured for storing semiconductor wafers.
7. The system as recited in claim 1 , wherein the container includes a container shell having a mechanically openable door.
8. A system, comprising:
a processing tool;
a load port defined by a first plate having an access port defined therein, the first plate of the load port being securable to a front side of the processing tool;
a first container support location defined at the access port, said access port enabling transfers of semiconductor wafers between the first container support location and the processing tool;
a second container support location defined above or below and vertically aligned with the first container support location;
a third container support location defined above or below and vertically aligned with the first container support location or the second container support location; and
a transfer module defined by a second plate distinct from the first plate and a container transport mechanism operably coupled to the second plate, the second plate including a track, the container transport mechanism configured to move vertically along the track, the second plate of the transfer module being securable to the processing tool at a location that is adjacent to the first plate on either a left adjacent side or a right adjacent side of the second plate, and wherein the transfer module is configured for moving containers among the first, second and third container support locations;
wherein the load port and the transfer module are each independently detachable from the processing tool;
wherein the first plate defines a width to accommodate only a single column of vertically aligned container support locations; and
wherein the second plate defines a width substantially similar to the width defined by the first plate;
wherein said first plate and said second plate conform to a Box Opener/Loader to Tool Standard Interface.
9. The system of claim 8 , further comprising:
a second access port defined in the first plate, wherein either the second or third container support locations are defined at the second access port.
10. The system as recited in claim 8 , wherein said transfer module includes:
the second plate; and
the container transport mechanism, including:
a carriage able to move vertically along the track;
an upper link arm having a first end and a second end, said first end rotatably coupled with said carriage;
a lower link arm having a first end and a second end, said first end rotatably coupled with said second end of said upper link arm; and
a gripper rotatably coupled with said second end of said lower link arm.
11. The system as recited in claim 8 , wherein the container is configured for storing semiconductor wafers.
12. The system as recited in claim 8 , wherein said first access location includes:
a container advance plate for supporting a container and moving the container between a first position and a second position; and
a port door for controlling access through said access port in said first plate.
13. The system as recited in claim 8 , wherein said transfer module includes a container transport mechanism that is configured to engage each container at a top handle.
14. A system, comprising:
a processing tool;
a load port defined by a first plate having an access port defined therein, the first plate of the load port being securable to a front side of the processing tool;
a first container support location defined at the access port, said access port enabling transfers of semiconductor wafers between the first container support location and the processing tool;
a second container support location defined above or below and vertically aligned with the first container support location;
a transfer module defined by a second plate distinct from the first plate and a container transport mechanism operably coupled to the second plate, the second plate including a track, the container transport mechanism configured to move vertically along the track, the second plate of the transfer module being securable to the processing tool at a location that is adjacent to the first plate on either a left adjacent side or a right adjacent side of the second plate, and wherein the transfer module is configured for moving containers among the first, second and third container support locations;
wherein the load port and the transfer module are each independently detachable from the processing tool;
wherein the first plate defines a width to accommodate only a single column of vertically aligned container support locations;
wherein said first plate and said second plate conform to a Box Opener/Loader to Tool Standard Interface; and
wherein the second plate defines a width substantially similar to the width defined by the first plate.
15. The system as recited in claim 14 , wherein said transfer module includes:
the second plate; and
the container transport mechanism, including:
a carriage able to move vertically along the track;
an upper link arm having a first end and a second end, said first end rotatably coupled with said carriage;
a lower link arm having a first end and a second end, said first end rotatably coupled with said second end of said upper link arm; and
a gripper rotatably coupled with said second end of said lower link arm.
16. The system as recited in claim 14 , wherein said first access location includes:
a container advance plate for supporting a container and moving the container between a first position and a second position; and
a port door for controlling access through said access port in said first plate.