IP Library › Patent Application 60819979
Patent Application Provisional
App. No. 60/819,979 · Confirmation No. 9082

Vertical wafer AMHS and EFEM

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2007-09-05 LET. Miscellaneous Incoming Letter 1 View
2007-09-05 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2007-09-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2006-07-11 TRNA Transmittal of New Application 2 View
2006-07-11 SPEC Specification 7 View
2006-07-11 DRW Drawings-only black and white line drawings 7 View
2006-07-11 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/819,979
Filed
2006-07-11