IP Library › Granted Patent US 6,592,679
Granted Patent Utility
US 6,592,679 · Confirmation No. 3703

CLEAN METHOD FOR VACUUM HOLDING OF SUBSTRATES

Inventor: Michael Krolak
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2001-07-13 TRNA Transmittal of New Application 3 View
2001-07-13 SPEC Specification 18 View
2001-07-13 CLM Claims 7 View
2001-07-13 ABST Abstract 1 View
2001-07-13 DRW Drawings-only black and white line drawings 5 View
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Quick Facts
Patent No.
US 6,592,679
App. No.
09/905,490
Filed
2001-07-13
Granted
2003-07-15
Pub. No.
US20030010358A1
Art Unit
1746
PTA
0 days