Access arbitration module and system for semiconductor fabrication equipment and methods for using and operating the same
View Patent ↗An access arbitration module includes a plurality of active component communication ports for communicating with a plurality of active components, and includes a passive component communication port for communicating with a passive component. The access arbitration module also includes switching logic defined to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port, such that an authorized one of the plurality of active component communication ports is connected in communication with the passive component communication port at a given time, and such that non-authorized ones of the plurality of active component communication ports are prevented from communication with the passive component communication port at the given time.
1. An access arbitration module for a passive component within a semiconductor fabrication facility, comprising:
a plurality of active component communication ports for communicating with a plurality of active components, wherein each of the plurality of active components is defined to handle one or more containers within the semiconductor fabrication facility, wherein each of the one or more containers is defined to hold at least one workpiece;
a passive component communication port for communicating with a passive component, the passive component defined to receive at least one container from any of the plurality of active components; and
switching circuitry defined to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port, the switching circuitry defined to direct transmission of access communication protocol signals from one of the plurality of active component communication ports to the passive component communication port at a given time while blocking transmission of access communication protocol signals from others of the plurality of active component communication ports at the given time, such that one of the plurality of active components is allowed to access the passive component at the given time.
2. The access arbitration module of claim 1 , wherein the plurality of active components include a near-tool container buffer system and an overhead container transport system.
3. The access arbitration module of claim 2 , wherein the plurality of active components further include an autonomous guided vehicle.
4. The access arbitration module of claim 1 , wherein the passive component is a loadport for a semiconductor processing tool.
5. The access arbitration module of claim 1 , wherein the access communication protocol signals comply with a SEMI E84 specification for enhanced carrier handoff parallel input/output interface.
6. The access arbitration module of claim 1 , further comprising:
a number of additional passive component communication ports for respectively communicating with a number of additional passive components, wherein the switching circuitry is defined to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port and the number of additional passive component communication ports.
7. The access arbitration module of claim 1 , wherein the switching circuitry is connected to each of the plurality of active component communication ports and the passive component communication port, the switching circuitry defined to pass through access communication protocol signals from one of the active component communication ports associated with one of the plurality of active components currently authorized to access the passive component, the switching circuitry further defined to block access communication protocol signals from others of the active component communication ports associated with others of the plurality of active components not currently authorized to access the passive component.
8. The access arbitration module of claim 7 , further comprising:
a computer processor, the switching circuitry connected to be controlled by signals transmitted from the computer processor.
9. The access arbitration module of claim 8 , further comprising:
a network port connected to the computer processor for communication with processing entities within the semiconductor fabrication facility.
10. A system, comprising:
a loadport for a semiconductor fabrication tool;
a first active component defined to deliver a workpiece container to the loadport;
a second active component defined to deliver a workpiece container to the loadport; and
an access arbitration module defined to communicate with each of the loadport, the first active component, and the second active component, the access arbitration module defined to control transmission of access communication protocol signals between each of the first and second active components and the loadport, such that one of the first and second active components is allowed to access the loadport at a given time, and such that another of the first and second active components is prevented from accessing the loadport at the given time.
11. The system of claim 10 , wherein the first active component is an overhead container transport system, and wherein the second active component is a near-tool container buffer system.
12. The system of claim 11 , wherein the access arbitration module is mounted on the near-tool container buffering system.
13. The system of claim 10 , wherein the access communication protocol signals comply with a SEMI E84 specification for enhanced carrier handoff parallel input/output interface.
14. The system of claim 10 , further comprising:
a number of additional loadports, the access arbitration module defined to communicate with each of the number of additional loadports and to control transmission of access communication protocol signals between each of the first and second active components and the number of additional loadports.
15. A method for controlling access to a loadport of a semiconductor fabrication tool, comprising:
transmitting a first access protocol signal from a first active component to the loadport;
transmitting a second access protocol signal from a second active component to the loadport;
operating an access arbitration module to intercept the first and second access protocol signals before they arrive at the loadport;
operating the access arbitration module to determine which of the first and second active components is currently granted access to access the loadport;
operating the access arbitration module to transmit the intercepted first access protocol signal through to the loadport and block the intercepted second access protocol signal from transmission to the loadport when the first active component is granted access to the loadport; and
operating the access arbitration module to transmit the intercepted second access protocol signal through to the loadport and block the intercepted first access protocol signal from transmission to the loadport when the second active component is granted access to the loadport.
16. The method of claim 15 , wherein the first and second access protocol signals comply with a SEMI E84 specification for enhanced carrier handoff parallel input/output interface.