Port door positioning apparatus and associated methods
View Patent ↗A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door.
1. A loadport, comprising:
a port door having a front surface, a back surface, a top surface, a bottom surface, and first and second vertical side surfaces each extending between the top and bottom surfaces, wherein the front surface of the port door is defined to interface with a container door of a container for holding semiconductor workpieces, when present;
a frame defined to have an opening through which the port door interfaces with the container door;
a positioning device connected to the port door to provide for controlled positioning and movement of the port door;
a movable closure mechanism affixed to the back surface of the port door between the top and bottom surfaces of the port door the movable closure mechanism positioned separate from the positioning device, the movable closure mechanism including moveable portions extending outward in a horizontal direction beyond each of the first and second vertical side surfaces of the port door, the moveable portions of the movable closure mechanism defined to be movable in a controlled manner relative to both the port door and the frame; and
stationary closure mechanisms disposed on the frame proximate to the opening of the frame at locations to engage with the moveable portions of the movable closure mechanism when the port door is present within the opening of the frame,
wherein movement of the moveable portions of the movable closure mechanism to respectively engage with the stationary closure mechanisms applies a closing force between the front surface of the port door and the container door.
2. The loadport as recited in claim 1 , wherein the closing force is directed in a substantially perpendicular direction between the front surface of the port door and the container door.
3. The loadport as recited in claim 1 , wherein the positioning device is defined to move the port door in a vertical direction relative to the opening of the frame, and wherein the positioning device is defined to move the port door in a horizontal direction within the opening of the frame.
4. The loadport as recited in claim 1 , wherein the movable portions of the movable closure mechanism are defined as a pair of guiding members that each extend outwardly beyond a respective one of the first and second vertical side surfaces of the port door at a position behind the back surface of the port door, wherein each of the pair of guiding members is defined to move in a substantially vertical direction relative to the port door and in a substantially simultaneous manner, and
wherein the stationary closure mechanisms are defined as a pair of cam plates respectively fixed proximate to the first and second vertical sides of the opening of the frame, wherein each of the pair of cam plates includes a channel formed to receive a respective one of the pair of guiding members, wherein each channel is defined to translate movement of the guiding member therein into a movement of the port door perpendicularly toward the container door so as to apply the closing force.
5. The loadport as recited in claim 4 , further comprising:
a pair of drive plates to which the pair of guiding members are respectively connected;
a pair of drive tracks to which the pair of drive plates are respectively connected, each of the pair of drive tracks connected to the back surface of the port door and oriented to direct movement of the drive plate connected thereto in a substantially vertical direction;
a drive source defined to control movement of the pair of drive plates along their respective drive tracks; and
a mechanical linkage defined to translate work of the drive source into simultaneous movement of the pair of drive plates.
6. The loadport as recited in claim 5 , wherein the mechanical linkage is defined as a motion transfer plate defined to move in a substantially horizontal direction relative to the port door, the motion transfer plate defined to engage each of the pair of drive plates, such that substantially horizontal movement of the motion transfer plate causes substantially equal and simultaneous vertical movement of each of the pair of drive plates and the pair of guiding members respectively connected to the pair of drive plates.
7. The loadport as recited in claim 6 , wherein the drive source is a motor having a lead screw connected for rotation by the motor, wherein the motor is connected to the back surface of the port door at a fixed position, wherein a nut threaded in a complementary manner with the lead screw is connected to the motion transfer plate to receive the lead screw, wherein the lead screw and the nut are oriented in the substantially horizontal direction relative to the port door such the rotation of the lead screw within the nut moves the nut and motion transfer plate connected thereto in the substantially horizontal direction.
8. The loadport as recited in claim 6 , wherein the drive source is a pneumatic cylinder having a drive rod connected thereto, wherein the pneumatic cylinder is connected to the back surface of the port door at a fixed position, wherein the drive rod is also connected to the motion transfer plate such that movement of the drive rod causes movement of the motion transfer plate in the substantially horizontal direction.
9. The loadport as recited in claim 1 , wherein the stationary closure mechanisms are defined as a pair of guiding members respectively fixed proximate to first and second vertical sides of the opening of the frame, and
wherein the movable portions of the movable closure mechanism are defined as a pair of movable cam plates respectively disposed along the first and second vertical side surfaces of the port door at respective positions behind and outside the back surface of the port door, wherein each of the pair of movable cam plates is defined to move in a substantially vertical direction relative to the port door and in a substantially simultaneous manner, wherein each of the pair of movable cam plates includes a channel formed to receive a respective one of the pair of guiding members, wherein each channel is defined to translate movement of its movable cam plate against the guiding member therein into a movement of the port door perpendicularly toward the container door so as to apply the closing force.
10. The loadport as recited in claim 9 , further comprising:
a pair of drive plates to which the pair of movable cam plates are respectively connected;
a pair of drive tracks to which the pair of drive plates are respectively connected, each of the pair of drive tracks connected to the back surface of the port door and oriented to direct movement of the drive plate connected thereto in a substantially vertical direction;
a drive source defined to control movement of the pair of drive plates along their respective drive tracks; and
a mechanical linkage defined to translate work of the drive source into simultaneous movement of the pair of drive plates.
11. The loadport as recited in claim 10 , wherein the mechanical linkage is defined as a motion transfer plate defined to move in a substantially horizontal direction relative to the port door, the motion transfer plate defined to engage each of the pair of drive plates, such that substantially horizontal movement of the motion transfer plate causes substantially equal vertical movement of each of the pair of drive plates and the pair of movable cam plates respectively connected to the pair of drive plates.
12. The loadport as recited in claim 11 , wherein the drive source is a motor having a lead screw connected for rotation by the motor, wherein the motor is connected to the back surface of the port door at a fixed position, wherein a nut threaded in a complementary manner with the lead screw is connected to the motion transfer plate to receive the lead screw, wherein the lead screw and the nut are oriented in the substantially horizontal direction relative to the port door such the rotation of the lead screw within the nut moves the nut and motion transfer plate connected thereto in the substantially horizontal direction.
13. The loadport as recited in claim 11 , wherein the drive source is a pneumatic cylinder having a drive rod connected thereto, wherein the pneumatic cylinder is connected to the back surface of the port door at a fixed position, wherein the drive rod is also connected to the motion transfer plate such that movement of the drive rod causes movement of the motion transfer plate in the substantially horizontal direction.
14. The loadport as recited in claim 10 , wherein the pair of movable cam plates are formed as respective portions of the pair of drive plates.
15. A loadport, comprising:
a port door having a front surface, a back surface, a top surface, a bottom surface, and first and second vertical side surfaces each extending between the top and bottom surfaces, wherein the front surface of the port door is defined to interface with a container door of a container for holding semiconductor workpieces, when present;
a frame defined to have an opening through which the port door interfaces with the container door;
a positioning device connected to the port door to provide for controlled positioning and movement of the port door;
a stationary closure mechanism affixed to the back surface of the port door between the top and bottom surfaces of the port door, the stationary closure mechanism positioned separate from the positioning device, the stationary closure mechanism including fixed portions extending outward beyond each of the first and second vertical side surfaces of the port door; and
movable closure mechanisms disposed on the frame proximate to the opening of the frame at locations to engage with the fixed portions of the stationary closure mechanism when the port door is present within the opening of the frame, the movable closure mechanisms defined to be movable in a controlled manner relative to both the frame and the port door,
wherein movement of the movable closure mechanisms to engage with the fixed portions of the stationary closure mechanism applies a closing force between the front surface of the port door and the container door.
16. The loadport as recited in claim 15 , wherein the closing force is directed in a substantially perpendicular direction between the front surface of the port door and the container door.
17. The loadport as recited in claim 15 , wherein the positioning device is defined to move the port door in a vertical direction relative to the opening of the frame, and wherein the positioning device is defined to move the port door in a horizontal direction within the opening of the frame.
18. The loadport as recited in claim 15 , wherein fixed portions of the stationary closure mechanism are defined as a pair of guiding members that each extend outwardly beyond a respective one of the first and second vertical side surfaces of the port door at a position behind the back surface of the port door, and
wherein the movable closure mechanisms are defined as a pair of movable cam plates respectively disposed proximate to the first and second vertical sides of the opening of the frame, wherein each of the pair of cam plates is defined to move in a substantially vertical direction relative to both the frame and the port door and in a substantially simultaneous manner, wherein each of the pair of movable cam plates includes a channel formed to receive a respective one of the pair of guiding members, wherein each channel is defined to translate movement of its movable cam plate against the guiding member therein into a movement of the port door perpendicularly toward the container door so as to apply the closing force.
19. The loadport as recited in claim 18 , further comprising:
a pair of drive plates to which the pair of movable cam plates are respectively connected;
a pair of drive tracks to which the pair of drive plates are respectively connected, each of the pair of drive tracks connected to the frame and oriented to direct movement of the drive plate connected thereto in a substantially vertical direction;
a drive source defined to control movement of the pair of drive plates along their respective drive tracks; and
a mechanical linkage defined to translate work of the drive source into simultaneous movement of the pair of drive plates.
20. The loadport as recited in claim 19 , wherein the mechanical linkage is defined as a motion transfer plate defined to move in a substantially horizontal direction relative to the frame, the motion transfer plate defined to engage each of the pair of drive plates, such that substantially horizontal movement of the motion transfer plate causes substantially equal and simultaneous vertical movement of each of the pair of drive plates and the pair of movable cam plates respectively connected to the pair of drive plates.
21. The loadport as recited in claim 20 , wherein the drive source is a motor having a lead screw connected for rotation by the motor, wherein the motor is connected to the frame at a fixed position, wherein a nut threaded in a complementary manner with the lead screw is connected to the motion transfer plate to receive the lead screw, wherein the lead screw and the nut are oriented in the substantially horizontal direction relative to the frame such the rotation of the lead screw within the nut moves the nut and motion transfer plate connected thereto in the substantially horizontal direction.
22. The loadport as recited in claim 20 , wherein the drive source is a pneumatic cylinder having a drive rod connected thereto, wherein the pneumatic cylinder is connected to the frame at a fixed position, wherein the drive rod is also connected to the motion transfer plate such that movement of the drive rod causes movement of the motion transfer plate in the substantially horizontal direction.
23. The loadport as recited in claim 19 , wherein the pair of movable cam plates are formed as respective portions of the pair of drive plates.
24. The loadport as recited in claim 15 , wherein the movable closure mechanisms are defined as a pair of guiding members respectively disposed proximate to first and second vertical sides of the opening of the frame, each of the pair of guiding members defined to move in a substantially vertical direction in a substantially simultaneous manner, and
wherein the fixed portions of the stationary closure mechanism are defined as a pair of cam plates respectively fixed along the first and second vertical side surfaces of the port door at respective positions behind and outside the back surface of the port door, wherein each of the pair of cam plates includes a channel formed to receive a respective one of the pair of guiding members, wherein each channel is defined to translate movement of the guiding member therein into a movement of the port door perpendicularly toward the container door so as to apply the closing force.
25. The loadport as recited in claim 24 , further comprising:
a pair of drive plates to which the pair of guiding members are respectively connected;
a pair of drive tracks to which the pair of drive plates are respectively connected, each of the pair of drive tracks connected to the frame and oriented to direct movement of the drive plate connected thereto in a substantially vertical direction;
a drive source defined to control movement of the pair of drive plates along their respective drive tracks; and
a mechanical linkage defined to translate work of the drive source into simultaneous movement of the pair of drive plates.
26. The loadport as recited in claim 25 , wherein the mechanical linkage is defined as a motion transfer plate defined to move in a substantially horizontal direction relative to the frame, the motion transfer plate defined to engage each of the pair of drive plates, such that substantially horizontal movement of the motion transfer plate causes substantially equal vertical movement of each of the pair of drive plates and the pair of guiding members respectively connected to the pair of drive plates.
27. The loadport as recited in claim 26 , wherein the drive source is a motor having a lead screw connected for rotation by the motor, wherein the motor is connected to the frame at a fixed position, wherein a nut threaded in a complementary manner with the lead screw is connected to the motion transfer plate to receive the lead screw, wherein the lead screw and the nut are oriented in the substantially horizontal direction relative to the frame such the rotation of the lead screw within the nut moves the nut and motion transfer plate connected thereto in the substantially horizontal direction.
28. The loadport as recited in claim 26 , wherein the drive source is a pneumatic cylinder having a drive rod connected thereto, wherein the pneumatic cylinder is connected to the frame at a fixed position, wherein the drive rod is also connected to the motion transfer plate such that movement of the drive rod causes movement of the motion transfer plate in the substantially horizontal direction.