High speed substrate aligner apparatus
View Patent ↗In accordance to an exemplary embodiment of the disclosed embodiments, a substrate aligner apparatus is presented, the substrate aligner apparatus having a frame adapted to allow a substrate transporter to transport a substrate to and from the aligner apparatus, an inverted chuck capable of holding the substrate and movably connected to the frame by a chuck driveshaft engaged to the inverted chuck for moving the inverted chuck relative to the frame and effecting alignment of the substrate, a sensing device located between the chuck and chuck driveshaft for detecting a position determining feature of the substrate, and a substrate transfer mechanism movably connected to the frame and located inside the frame below the inverted chuck for moving the substrate from the inverted chuck to the substrate transporter.
1. A substrate aligner apparatus comprising:
a frame adapted to allow a substrate transporter to transport a substrate to and from the aligner apparatus;
an inverted chuck, having an inverted chuck gripping system, capable of holding the substrate and movably connected to the frame by a chuck driveshaft disposed above and engaged to the inverted chuck for moving the inverted chuck relative to the frame and effecting alignment of the substrate;
a sensing device located between a substrate holding portion of the inverted chuck gripping system and chuck driveshaft for detecting a position determining feature of the substrate; and
a substrate transfer mechanism movably connected to the frame and located inside the frame below the inverted chuck for moving the substrate from the inverted chuck to the substrate transporter.
2. The apparatus according to claim 1 , wherein the inverted chuck is configured to allow the substrate transporter to remain within the frame during alignment of the substrate.
3. The apparatus according to claim 1 , further comprising a contamination shield located between the inverted chuck gripping system and the chuck driveshaft.
4. The apparatus according to claim 1 , wherein the inverted chuck gripping system comprises a first and a second end extending radially from the center of the inverted chuck for gripping opposite sides of the substrate.
5. The apparatus according to claim 4 , wherein each of the first and second ends of the inverted chuck gripping system has gripping pads, and wherein one or more of the gripping pads are movable allowing the gripping and releasing of the substrate.
6. The apparatus according to claim 4 , wherein the inverted chuck gripping system is adapted for gripping the edges of the substrate.
7. The apparatus according to claim 1 , wherein the sensing device is fixed relative to the frame.
8. The apparatus according to claim 1 , wherein the sensing device comprises a reflective optical sensor.
9. The apparatus according to claim 1 , wherein the substrate transfer mechanism comprises independently movable lifting pads, each lifting pad being capable of independently transferring the substrate from the inverted chuck to the substrate transporter.
10. The apparatus according to claim 9 , wherein each lifting pad is adapted for edge gripping the substrate.
11. The apparatus according to claim 9 , wherein the lifting pads are disposed so that independent of the substrate transporter location within the frame, at least one of the lifting pads is capable of accessing the inverted chuck for transferring the substrate from the chuck to the substrate transporter.
12. A substrate aligner apparatus comprising:
a frame adapted to allow a substrate transporter to transport a substrate to and from the aligner apparatus;
a drive section connected to the frame;
a first substrate interface section movably connected to the frame for directly interfacing with the substrate and operably connected to the drive section for effecting movement of the first substrate interface section relative to the frame; and
a second substrate interface section disposed beneath the first substrate interface section and movably connected to the frame for directly interfacing with the substrate and operably connected to the drive section for effecting movement of the second substrate interface section relative to the frame;
wherein the first substrate interface section is moved for effecting detection of a position determining feature of the substrate while the substrate is located on the first substrate interface, and the second substrate interface section is moved in a direction substantially perpendicular to a plane of the substrate on the first substrate interface to remove the substrate from the first substrate interface section for effecting repositioning of the substrate.