Position feedback for self bearing motor

1. A substrate transport sensing mechanism comprising:

a rotor magnetic source on a substrate transport motor rotor and having a ferromagnetic target coupled thereto;

a plurality of read heads, each read head having

a sensor magnetic source disposed adjacent the ferromagnetic target and separated from the ferromagnetic target and rotor magnetic source by an isolation casing,

a magnetic flux sensor disposed so as to read the sensor magnetic source through the isolation casing, and

a sensor backing on which the sensor magnetic source and the magnetic flux sensor are mounted, both on a single side of the ferromagnetic target; and

a circuitry connected to each of the magnetic flux sensors;

a single absolute scale coupled to the ferromagnetic target;

wherein:

the sensor magnetic source and the magnetic flux sensor are arranged to form a magnetic circuit that passes serially through the sensor magnetic source, the ferromagnetic target, the magnetic flux sensor, and the sensor backing,

the magnetic flux sensor has an output proportional to the intensity of the magnetic flux passing from the ferromagnetic target to the magnetic flux sensor, where the proportionality of the sensor output provides unique correlation to and discriminative of each different distance measure magnitude quantity from each other different distance measure magnitude quantity of a variable radial distance of, and coincident with, a gap between and bounded by a pole surface of the sensor magnetic source and a surface of the single absolute scale coupled to the ferromagnetic target substantially athwart the pole surface of the sensor magnetic source, which gap and the coincident variable radial distance vary normal to the pole surface of the sensor magnetic source in an unknown manner, and

wherein the circuitry has a configuration that, for each read head:

processes the magnetic flux sensor output,

quantifies, based on the unique correlation from the magnetic flux sensor output, a present distance measure magnitude quantity of a present radial distance, from the variable radial distance, of the gap bounded by the pole surface of the sensor magnetic source and the surface of single absolute scale coupled to the ferromagnetic target, and the circuitry outputs a signal that embodies the present distance measure magnitude quantity of the present radial distance, determined based on the unique correlation, between the pole surface of the sensor magnetic source and the surface of the single absolute scale coupled to the ferromagnetic target substantially athwart the pole surface of the sensor magnetic source, and

simultaneously generates, from the single absolute scale, an absolute rotational position of the single absolute scale and an interpolated incremental rotational position of the single absolute scale within a resolution of the absolute rotational position.

2. The sensing mechanism of claim 1 , wherein the magnetic flux sensor is operable to sense variable magnetic flux intensities caused by the single absolute scale and the circuitry outputs a signal that is indicative of an absolute position of the ferromagnetic target.

3. The sensing mechanism of claim 1 , wherein the single absolute scale is an absolute digital scale.

4. The sensing mechanism of claim 3 , wherein the absolute digital scale is a single track Gray code scale.

5. The sensing mechanism of claim 1 , wherein the circuitry outputs the signal indicative of the incremental interpolated position between successive measured absolute positions of the single absolute scale coupled to the ferromagnetic target.

6. The sensing mechanism of claim 5 , wherein the circuitry is configured so that the circuitry processes an analog signal from the magnetic flux sensor and generates the output signal as a digital output pattern indicating the absolute rotational position of the single absolute scale and the interpolated incremental rotational position between the successive measured absolute positions of the single absolute scale, the analog signal including the magnetic flux sensor output.

7. The sensing mechanism of claim 1 , wherein each read head is configured to provide position information corresponding to a distance between a point on the single absolute scale facing a respective read head and an origin of the single absolute scale.

8. The sensing mechanism of claim 7 , wherein the circuitry is configured to determine an orientation and the present distance measure magnitude quantity of the present radial distance of the substrate transport motor rotor based on the position information corresponding to the distance between the point on the single absolute scale facing the respective read head and the origin of the single absolute scale.

9. The sensing mechanism of claim 1 , wherein:

each of the plurality of read heads, facing the single absolute scale, are configured to provide the magnetic flux sensor output as a signal that embodies a tangential position magnitude quantity based on a translation of the single absolute scale; and

the circuitry, connected to the plurality of read heads, is configured to determine the absolute rotational position and the interpolated incremental rotational position of the substrate transport motor rotor with respect to a reference frame based on the signal that embodies the tangential position magnitude quantity based on the translation of the single absolute scale.

10. The sensing mechanism of claim 9 , wherein the eccentricity and rotational position of the substrate transport motor rotor are simultaneously measured.

11. The sensing mechanism of claim 7 , wherein the plurality of read heads are substantially equidistant from each other.