Integrated gripper for workpiece transfer
View Patent ↗An integrated grip arm comprises a plurality of grippers to accommodate a plurality of reticles and carrier boxes without the need of separate arm or gripper changes. The integrated grip arm can comprise an edge gripper for gripping a reticle or a carrier box at the edges, and a fork gripper for gripping a reticle or a carrier box at a top and a bottom portions. The integrated grip arm can comprise an edge gripper for gripping a wafer from the edges and an end effector for holding a wafer from the bottom. The integrated grip arm can comprise a vertical gripper for gripping a workpiece from a vertical position and a horizontal gripper for gripping a workpiece from a horizontal position.
1. An integrated reticle handler for picking and placing one or more reticles, comprising
an edge gripping mechanism;
an edge gripper coupled to the edge gripping mechanism for handling a first reticle, the edge gripper comprising a plurality of gripper posts, wherein the gripper posts are configured for gripping the first reticle from the edges of two sides, and wherein the edge gripper comprises two or more U-groove shape arms for gripping the first reticle on the left and right sides of the first reticle facing the gripper;
a fork gripper mechanism;
a fork gripper coupled to the fork gripper mechanism for handling a second reticle, the fork gripper configured for gripping the second reticle from one side, the fork gripper comprising one or more forks having a top section and a bottom section, wherein the top section and the bottom section are configured for sandwiching the second reticle without extending outside the edges of two sides of the second reticle.
2. A handler as in claim 1 further comprising a mechanism to position the proper gripper to face the reticle.
3. A handler as in claim 1 wherein the edge gripper comprises a movement mechanism for moving the plurality of gripper posts toward the reticle.
4. A handler as in claim 1 wherein the fork gripper comprises two two-prong forks for gripping a reticle from an edge of the reticle facing the handler.
5. A reticle stocker comprising a handler as in claim 1 , the reticle stocker further comprising a plurality of stations dedicated to different types of reticles.
6. A handler as in claim 1 wherein one of the top section of a fork is longer than the bottom section, and the bottom section of a fork is longer than the top section.
7. A handler as in claim 1 wherein the edge gripper and the fork gripper are further configured for gripping a carrier box.
8. A handler as in claim 1 further comprising a transfer arm capable of rotation and translation, wherein the edge gripper and the fork gripper are affixed to the transfer arm.
9. An integrated wafer handler for picking and placing one or more wafers, wherein each wafer comprises one or more edges and a bottom, the wafer handler comprising
a robot arm;
an edge gripper for gripping a first wafer from the edges, the edge gripper fixedly coupled to the robot arm, wherein the edge gripper comprises an arm with two or more U-groove shape sections for gripping the first wafer from the edges;
an end effector for holding a second wafer from the bottom substantially away from at least an edge of the second wafer, the end effector fixedly coupled to the robot arm at an angle away from the edge gripper.
10. A handler as in claim 9 wherein the handler is configured to use in a wafer stocker.
11. A handler as in claim 9 wherein the robot arm is rotatable around an axle, allowing gripping a wafer in a vertical position.