Patent Application
Provisional
App. No. 62/970,565
· Confirmation No. 6295
SUBSTRATE PROCESSING APPARATUS
Inventors:
Christopher BUSSIERE, Kevin M. BOURBEAU, Emilien Joseph Claude AUDERBRAND, Joseph M. HALLISEY
Applicant:
Brooks Automation, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2020-04-28 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2020-04-27 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 2 | View | |
| 2020-04-27 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2020-04-27 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2020-02-28 | NTC.MISS.PRT |
Notice to File Missing Parts | 2 | View | |
| 2020-02-28 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2020-02-05 | ADS |
Application Data Sheet | 9 | View | |
| 2020-02-05 | SPEC |
Specification | 174 | View | |
| 2020-02-05 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2020-02-05 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2020-02-05 | DRW |
Drawings-only black and white line drawings | 56 | View |
Inventors
Christopher BUSSIERE
Groton, MA
Kevin M. BOURBEAU
Pepperell, MA
Emilien Joseph Claude AUDERBRAND
Marlborough, MA
Joseph M. HALLISEY
Pepperell, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 106446
- Docket No.
- 390P015874-US(-#1)
- Confirmation No.
- 6295
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-12-09
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-12-09
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Quick Facts
- App. No.
- 62/970,565
- Filed
- 2020-02-05
External Links