Substrate carrier having drip edge configurations
View Patent ↗Substrate carrier can have drainage area leading the liquid away from the substrates, so that liquid droplet can be channeled away from the substrate area. The drainage area can include tilted lines and surfaces toward the ground away from the substrates. The carrier can further have drainage area leading the liquid to an end of the carrier, which then can be channeled to the ground without being free fall to the ground.
1. A semiconductor substrate carrier for supporting one or more semiconductor substrates, the semiconductor substrate carrier comprising:
at least one first structure that defines a space, of the semiconductor substrate carrier, in which semiconductor substrates are held within the at least one first structure,
wherein the at least one first structure comprises a rod,
wherein the rod is re-enforced with a metal core; and
at least one second structure,
wherein the at least one second structure is secured to the at least one first structure, and
wherein the at least one second structure is partially protruded into the space so as to separate two adjacent semiconductor substrates disposed within the at least one first structure, wherein each surface of the at least one second structure partially protruded into the space is configured so as to direct liquid droplets away from the space in which semiconductor substrates are held.
2. A semiconductor substrate carrier as in claim 1 , further comprising:
wherein the at least one second structure comprises a plurality of teeth, and
wherein the plurality of teeth are positioned at a slanted angle, leading a droplet along a slanted path away from a respective semiconductor substrate.
3. A semiconductor substrate carrier as in claim 2 , further comprising:
wherein the plurality of teeth comprises at least one of a sharp corner and a rounded corner.
4. A semiconductor substrate carrier as in claim 2 , further comprising:
wherein the plurality of teeth are configured to comprise at least one drip edge leading away from the tips of the teeth.
5. A semiconductor substrate carrier as in claim 2 , further comprising:
wherein the plurality of teeth comprises at least one of a pyramid shape comprising at least one of an elliptical base and a polygon base, and, a cone shape comprising at least one of an elliptical base and a polygon base.
6. A semiconductor substrate carrier as in claim 1 , further comprising:
wherein the at least one second structure does not have a point, a horizontal line or a horizontal surface within the space, which can trap the liquid droplets.
7. A semiconductor substrate carrier as in claim 1 , further comprising:
wherein the at least one first structure is configured so that liquid droplets are drained by gravitation force toward one end of the at least one first structure.
8. A carrier for supporting one or more substrates, the carrier comprising:
at least one first structure,
wherein the first structure comprises an L shape having one side partially covering a side of the carrier and one side partially covering the bottom of the carrier,
wherein the first structure comprises a plastic rod re-enforced with a metal core;
at least one second structure,
wherein the second structure is secured to the first structure, and
wherein the second structure is partially protruded to a space for separating two adjacent substrates.
9. A carrier as in claim 8 , further comprising:
wherein the protruded portion of the second structure comprises a pyramid or a cone shape.
10. A carrier as in claim 9 , further comprising:
wherein the pyramid comprises an edge at the bottommost section.
11. A carrier as in claim 9 , further comprising:
wherein the pyramid or the cone shape comprise an apex pointing upward from the first structure.
12. A carrier as in claim 8 , further comprising:
wherein the cross-section of the rod comprises an elliptical shape,
wherein the cross-section of the rod comprises a quasi-square shape, or
wherein the cross-section of the rod comprises a triangular shape.
13. A carrier as in claim 8 , further comprising:
wherein a plurality of rods are configured to be slanted at an angle and parallel.
14. A carrier as in claim 8 , further comprising:
wherein the first structure comprises a slanted angle.
15. A carrier as in claim 8 , further comprising:
wherein the second structure comprises surfaces tilting away from the substrates so that liquid droplets are drained by gravitation force away from the space.
16. A carrier as in claim 8 , further comprising:
wherein the first structure is disposed at a side of the carrier, and the carrier further comprises a bottom structure for supporting the substrates at the bottom of the carrier.
17. A carrier as in claim 8 , further comprising:
wherein the rod is circular, and
wherein the second structure comprises a curve upper portion.