Transfer chamber between workstations
View Patent ↗A bridging chamber is constructed between adjacent substrate processing workstation systems and connected by ports constructed in the adjacent substrate processing workstation systems. Transport mechanisms are used to move the substrates into and out of the bridging chamber to bypass primary transport systems.
1. In a semiconductor fabrication facility having at least a first workstation system and a second workstation system connected by means of a primary substrate handling system, the improvement comprising:
the first workstation and second workstation systems being connected by a secondary transport system comprising a bridging chamber communicating with the at least first and second workstation systems, constructed to admit at least one substrate there through,
wherein the primary substrate handling system is an automated material handling system configured to transport substrates in cassettes and forms a first transport path that is a primary path for moving substrates between the first workstation and second workstation systems and the bridging chamber is linked to the primary substrate handling system and forms a bypass transport path to the primary transport path of the primary substrate handling system, and
a controller connected to the secondary transport system, the controller being configured to create the bypass transport path where the bypass transport path is created and configured to transport substrates on information that the primary transport path is unavailable.
2. The fabrication facility, according to claim 1 , further comprising:
a first transport mechanism constructed in the first workstation system for transporting at least one substrate within the first workstation system,
a second transport mechanism constructed in the second workstation system for transporting the at least one substrate within the second workstation; and
wherein the first transport mechanism is adapted to transfer the at least one substrate from the first workstation system to the bridging chamber and the second transport mechanism is adapted to transfer the at least one substrate from the bridging chamber into the second workstation system.
3. The fabrication facility, according to claim 2 , wherein the first transport mechanism forms part of a front end loading system of the first workstation system.
4. The fabrication facility, according to claim 2 , wherein the second transport mechanism forms part of a front end loading system of the second workstation system.
5. The fabrication facility, according to claim 2 , wherein the first workstation system is a batch processing system having multiple process chambers communicating with a common transport chamber, and wherein the first transport mechanism comprises a transport robot housed in the common transport chamber.
6. The fabrication facility, according to claim 2 , wherein the second workstation system is a batch processing system having multiple process chambers communicating with a common transport chamber, and wherein the second transport mechanism comprises a transport robot housed in the common transport chamber.
7. The fabrication facility, according to claim 1 , wherein the bridging chamber further comprises metrology instrumentation for measuring characteristics of the at least one substrate in the bridging chamber.
8. The fabrication facility, according to claim 1 , wherein the bridging chamber further comprises alignment apparatus for registering the at least one substrate in a predetermined position.
9. The fabrication facility, according to claim 1 , wherein the bridging chamber further comprises valves operative to open and close receiving and dispensing ports linking the bridging chamber with the first workstation and second workstation systems according to a predetermined cycle to isolate the atmosphere within the bridging chamber.
10. The fabrication facility, according to claim 1 , wherein the bridging chamber further comprises an atmosphere control system for controlling the atmosphere of the bridging chamber to form a transfer lock between the first and second workstation systems.
11. The fabrication facility, according to claim 1 , wherein said at least first and second workstation systems are batch processing systems each having multiple process chambers communicating with a common transport chamber, and wherein the bridging chamber has a receiving port that is connected to an output port constructed in the transport chamber of the first workstation system, and has a dispensing port that is connected to an input port constructed in the transport chamber of the second workstation system.
12. The fabrication facility, according to claim 1 , wherein the controller is configured to coordinate operations of the bridging station with operations of the primary substrate handling system when the first transport path is unavailable.
13. A semiconductor fabrication facility comprising:
at least a first workstation and second workstation systems each having input/output stations for loading and unloading a respective one of the workstation systems;
a first substrate handling system where the first substrate handling system is an automated material handling system configured to move substrates in cassettes through the fabrication facility along a first substrate transport path and to provide substrates to the input/output stations of the first workstation and the second workstation systems, the first substrate path being a primary substrate transport path; and
a bypass system, linked to the first substrate handling system, coupling the at least first workstation and second workstation systems, the bypass system including a controller configured to create a second substrate transport path through the coupling of the at least first and second workstation systems, that is separate from the primary substrate transport path between at least the first workstation and second workstation systems, on information that the primary substrate transport path is unavailable.