Container storage add-on for bare workpiece stocker
View Patent ↗The present invention relates to apparatuses and methods to store and transfer objects, and more particularly to workpiece stocker configurations such as stacker for semiconductor wafers, reticles or carrier boxes.
1. A method for storing workpieces, the method comprising:
providing a stocker configured to store at least one of a bare workpiece and at least a portion of a workpiece transport container;
providing a buffer storage add-on for the stocker, the buffer storage add-on comprises:
a storage chamber,
wherein the storage chamber comprises a first outside sidewall exterior face having a closable opening, wherein the first outside sidewall exterior face is configured to be coupled with a second outside sidewall of the stocker so as to be sealed with a second outside sidewall exterior face of the stocker, such that the first outside sidewall exterior face faces opposite the second outside sidewall exterior face, the second outside sidewall exterior face having another closable opening different and distinct from the closable opening of the first outside sidewall exterior face, wherein a shared interior environment, between the stocker and the storage chamber via the closable opening and the another closable opening, is sealed from an outside environment with both the closable opening and the another closable opening both open;
wherein the second outside sidewall exterior face of the stocker is different than a front sidewall of the stocker, the front sidewall including a load lock station, wherein the load lock station is separate and distinct from the second outside sidewall of the stocker; and
transporting at least the portion of the workpiece transport container between the buffer storage add-on and the stocker, with or without workpieces within the portion of the workpiece transport container, with a container handler mounted in the storage chamber, the container handler comprising an end handle for supporting at least the portion of the workpiece transport container, the container handler comprising an extension mechanism for extending the end handle, wherein the end handle is configured to be extended through the closable opening of the first outside sidewall exterior face beyond the first outside sidewall exterior face, passing through the another closable opening of the second outside sidewall exterior face to an inside of the stocker towards the front sidewall.