IP Library Granted Patent US 6,609,876
Granted Patent Utility
US 6,609,876 · Confirmation No. 1373

LOADING AND UNLOADING STATION FOR SEMICONDUCTOR PROCESSING INSTALLATIONS

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Code Description Pages PDF
2002-03-12 TRNA Transmittal of New Application 2 View
2002-03-12 DRW Drawings-only black and white line drawings 10 View
2001-11-13 TRNA Transmittal of New Application 5 View
2001-11-13 A.PE Preliminary Amendment 18 View
2001-11-13 SPEC Specification 12 View
2001-11-13 CLM Claims 3 View
2001-11-13 ABST Abstract 1 View
2001-11-13 DRW Drawings-only black and white line drawings 10 View
2001-11-13 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,609,876
App. No.
10/012,142
Filed
2001-11-13
Granted
2003-08-26
Pub. No.
US20020090284A1
Art Unit
3651
PTA
-8 days