Patent Application
Utility
Small
App. No. 11/877,294
· Confirmation No. 7668
METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-03-29 | ABN |
Abandonment | 2 | View | |
| 2010-08-04 | CTFR |
Final Rejection | 10 | View | |
| 2010-08-04 | FWCLM |
Index of Claims | 1 | View | |
| 2010-06-10 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2010-06-10 | CLM |
Claims | 3 | View | |
| 2010-06-10 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2010-06-10 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-06-10 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-06-10 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2009-12-10 | CTNF |
Non-Final Rejection | 9 | View | |
| 2009-12-10 | 892 |
List of references cited by examiner | 1 | View | |
| 2009-12-10 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2009-12-10 | FWCLM |
Index of Claims | 1 | View | |
| 2009-12-10 | SRNT |
Examiner's search strategy and results | 6 | View | |
| 2009-12-10 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2009-12-10 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2008-10-30 | A.PE |
Preliminary Amendment | 1 | View | |
| 2008-10-30 | CLM |
Claims | 3 | View | |
| 2008-10-30 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2008-10-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2008-06-05 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2008-05-30 | A.PE |
Preliminary Amendment | 1 | View | |
| 2008-05-30 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2008-05-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2008-05-30 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2008-02-27 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2008-02-15 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 2 | View | |
| 2008-02-15 | XT/ |
Extension of Time | 1 | View | |
| 2008-02-15 | OATH |
Oath or Declaration filed | 9 | View | |
| 2008-02-15 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-02-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-11-15 | NTC.MISS.PRT |
Notice to File Missing Parts | 2 | View | |
| 2007-11-15 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2007-10-23 | ADS |
Application Data Sheet | 5 | View | |
| 2007-10-23 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2007-10-23 | SPEC |
Specification | 40 | View | |
| 2007-10-23 | CLM |
Claims | 1 | View | |
| 2007-10-23 | ABST |
Abstract | 1 | View | |
| 2007-10-23 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Patrick D. Pannese
Lynnfield, MA
Vinaya Kavathekar
Cupertino, CA
Peter van der Meulen
Newburyport, MA
Attorneys & Agents of Record
Classification
USPC
703/14
G05B17/02
Prosecution
- Examiner
- LUU, CUONG V
- Art Unit
- 2128
- Customer No.
- 43520
- Docket No.
- BLUE-X010-P15
- Confirmation No.
- 7668
Publication
- Pub. No.
- US20080134076A1
- Pub. Date
- 2008-06-05
Parent
is a Continuation in-part of
→
App. 10/985,834
· US 7,458,763
Filed 2004-11-10
· Patented Case
Parent
Claims priority from a provisional application
→
App. 60/518,823
Filed 2003-11-10
· Provisional Application Expired
Parent
Claims priority from a provisional application
→
App. 60/607,649
Filed 2004-09-07
· Provisional Application Expired
Parent
is a Continuation in-part of
→
App. 11/302,563
· US 7,890,194
Filed 2005-12-13
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-12-09
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-12-09
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Quick Facts
- App. No.
- 11/877,294
- Filed
- 2007-10-23
- Pub. No.
- US20080134076A1
- Examiner
- LUU, CUONG V
- Art Unit
- 2128
External Links