Reticle tracking and cleaning
A reticle assembly includes a reticle with a reticle plate. A radio frequency device is positioned on the reticle for providing information regarding the reticle to a reader by radio frequency.
1. A reticle assembly comprising:
a reticle including a reticle plate;
a pellicle mounted to the reticle plate by a pellicle frame; and
a radio frequency device mounted to the pellicle frame for providing information regarding the reticle to a reader by radio frequency.
2. The reticle assembly of claim 1 in which the radio frequency device can be removed with the pellicle frame when the reticle is cleaned.
3. A container assembly comprising:
a container; and
at least one reticle assembly positioned within the container, the reticle assembly including a reticle plate, a pellicle mounted to the reticle plate by a pellicle frame, and a radio frequency device mounted to the pellicle frame for providing information regarding the reticle to a reader positioned externally to the container by radio frequency.
4. A method of tracking a reticle, the reticle having a reticle plate, the method comprising:
mounting a pellicle to the reticle plate by a pellicle frame;
mounting a radio frequency device to the pellicle frame; and
reading information regarding the reticle from the radio frequency device with a reader by radio frequency.
5. The method of claim 4 further comprising reading the reticle while the reticle is enclosed within a container.