Granted Patent
Utility
US 6,591,162 · App. 09/641,032
Smart load port with integrated carrier monitoring and fab-wide carrier management system
Inventor:
Raymond S. Martin
Patented Case
View Patent ↗
Granted: Jul 8, 2003
Filed: Aug 16, 2000
Inventor
Raymond S. Martin
Assignee (at issue)
Asyst Technologies L.L.C.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.