IP Library Patent Application 61662690
Patent Application Provisional
App. No. 61/662,690 · Confirmation No. 1013

SUBSTRATE PROCESSING APPARATUS

Provisional Application Expired
⬇ PDF
Code Description Pages PDF
2012-07-09 APP.FILE.REC Filing Receipt 3 View
2012-07-06 WFEE Fee Worksheet (SB06) 1 View
2012-06-21 TR.PROV Provisional Cover Sheet (SB16) 3 View
2012-06-21 WFEE Fee Worksheet (SB06) 2 View
2012-06-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-06-21 SPEC Specification 123 View
2012-06-21 DRW Drawings-only black and white line drawings 38 View
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Quick Facts
App. No.
61/662,690
Filed
2012-06-21