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App. No. 19/552,716 · Confirmation No. 3547

SUBSTRATE PROCESSING APPARATUS

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2026-07-02 NTC.PUB Notice of Publication 1 View
2026-03-27 APP.FILE.REC Filing Receipt 4 View
2026-03-27 WFEE Fee Worksheet (SB06) 1 View
2026-03-27 WELCOME.LET Welcome Letter from USPTO Director and Deputy Director 1 View
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2026-02-27 DRW.SUPP Drawings-black and white line and/or other drawings — View
2026-02-27 ADS Application Data Sheet 10 View
2026-02-27 SPEC Specification 67 View
2026-02-27 CLM Claims 3 View
2026-02-27 ABST Abstract 1 View
2026-02-27 PA.. Power of Attorney 2 View
2026-02-27 DRW Drawings-only black and white line drawings 49 View
2026-02-27 R3.73 Assignee showing of ownership per 37 CFR 3.73 8 View
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2026-02-27 TRAN.LET Transmittal Letter 2 View
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Quick Facts
App. No.
19/552,716
Filed
2026-02-27
Pub. No.
US20260190946A1
Art Unit
OPAP