Patent Assignment
Reel/Frame 075132/0805
Assignment of Assignor's Interest
Recorded: 2026-03-19
Received: 2026-03-19
Pages: 41
Assignor
BROOKS AUTOMATION, INC.
Executed: 2021-10-01
Assignee
BROOKS AUTOMATION HOLDING, LLC
15 ELIZABETH DRIVE, CHELMSFORD, MA, 01824, UNITED STATES
Covered Property
(1)
Substrate Processing Apparatus
Application:
19/552,716 →