Scalable stockers with automatic handling buffer
View Patent ↗Scalable storage can be achieved with linear array storage of wafers, comprising two linear arrays of storage compartments on opposite walls, with a middle transfer mechanism. Together with a buffer station for automatic material handling system, a scalable bare wafer stocker can provide flexible and uninterrupted services to a fabrication facility.
1. A bare substrate stocker comprising:
a stocker storage for storing bare substrates, the stocker storage further comprising a storage robotic mechanism for accessing the substrates stored in the stocker storage;
a stocker loading station configured for receiving a container containing substrates from an operator, the stocker loading station interfaced with the stocker storage for transferring substrates between the container and the stocker storage area;
a transport buffer comprising:
one or more buffer stations for storing one or more containers containing substrates,
wherein the buffer stations are arranged in a two-row buffer station array with a linear container transfer mechanism in the middle of the two-row buffer station array wherein each row of the two-row buffer station array comprises a plurality of storage locations;
a buffer loading station configured for supporting a container; and
a buffer transfer mechanism to transfer a container between the buffer loading station and the buffer stations,
wherein the transport buffer is configured to accept a container from the stocker loading station and from an automatic transport; and
an interface mechanism adapted for transferring a container between the stocker loading station and the transport buffer.
2. A stocker as in claim 1 wherein the stocker storage further comprises a drop station, wherein the drop station accepts a single substrate from the stocker loading station, and wherein the storage robotic mechanism is configured to transfer a substrate between the drop station and the stocker storage.
3. A stocker as in claim 2 wherein the drop station is adapted to allow the substrate to be picked up at the bottom and at the edge.
4. A bare substrate stocker comprising:
a stocker storage for storing bare substrates, the stocker storage further comprising a storage robotic mechanism for accessing the substrates stored in the stocker storage, wherein the stocker storage further comprises a drop station, wherein the drop station accepts a single substrate from a stocker loading station, and wherein the storage robotic mechanism is configured to transfer a substrate between the drop station and the stocker storage;
a stocker loading station configured for receiving a container containing substrates from an operator, the stocker loading station interfaced with the stocker storage for transferring substrates between the container and the stocker storage area;
a transport buffer comprising:
one or more buffer stations for storing one or more containers containing substrates; and
a buffer loading station configured for supporting a container;
a buffer transfer mechanism to transfer a container between the buffer loading station and the buffer stations,
wherein the transport buffer is configured to accept a container from the stocker loading station and from an automatic transport;
an interface mechanism adapted for transferring a container between the stocker loading station and the transport buffer;
a loading robotic mechanism, the loading robotic mechanism configured to transfer a substrate between the stocker loading station and the drop station; and
a mechanism configured for transferring a container between the transport buffer and the automatic transport or a mechanism configured for transferring a container between the stocker loading station and the automatic transport.
5. A bare substrate stocker comprising:
a stocker storage for storing bare substrates, the stocker storage further comprising a storage robotic mechanism for accessing the substrates stored in the stocker storage, wherein the stocker storage further comprises a drop station, wherein the drop station accepts a single substrate from a stocker loading station, and wherein the storage robotic mechanism is configured to transfer a substrate between the drop station and the stocker storage;
a stocker loading station configured for receiving a container containing substrates from an operator, the stocker loading station interfaced with the stocker storage for transferring substrates between the container and the stocker storage area;
a transport buffer comprising:
one or more buffer stations for storing one or more containers containing substrates; and
a buffer loading station configured for supporting a container;
a buffer transfer mechanism to transfer a container between the buffer loading station and the buffer stations,
wherein the transport buffer is configured to accept a container from the stocker loading station and from an automatic transport;
an interface mechanism adapted for transferring a container between the stocker loading station and the transport buffer;
a loading robotic mechanism, the loading robotic mechanism configured to transfer a substrate between a substrate container disposed in the stocker loading station and the drop station; and
a mechanism configured for transferring a container between the transport buffer and the automatic transport or a mechanism configured for transferring a container between the stocker loading station and the automatic transport.
6. A bare substrate stocker comprising:
a stocker storage for storing bare substrates,
wherein the stocker storage comprises
a housing defining a storage area, the housing comprising two substantially parallel and opposite side walls;
a plurality of compartments forming one layer depth of storage containers on each of the side walls;
a storage robotic mechanism for accessing the substrates stored in the stocker storage, wherein the storage robotic mechanism is disposed between the layers of compartment, the robotic mechanism comprising at least a linear guide along one side of the side walls for reaching the compartments disposed on the side walls, the storage robotic mechanism further comprising a storage containers handler to access the storage containers stored in the compartments;
a stocker loading station configured for receiving a container containing substrates from an operator, the stocker loading station interfaced with the stocker storage for transferring substrates between the container and the stocker storage area;
a transport buffer comprising:
one or more buffer stations for storing one or more containers containing substrates; and
a buffer loading station configured for supporting a container;
a buffer transfer mechanism to transfer a container between the buffer loading station and the buffer stations,
wherein the transport buffer is configured to accept a container from the stocker loading station and from an automatic transport; and
an interface mechanism adapted for transferring a container between the stocker loading station and the transport buffer.
7. A stocker as in claim 6 wherein the stocker storage further comprises a drop station, wherein the drop station accepts a single substrate from the stocker loading station, and wherein the storage robotic mechanism is configured to transfer a substrate between the drop station and the stocker storage.
8. A stocker as in claim 7 wherein the drop station is adapted to allow the substrate to be picked up at the bottom and at the edge.