Granted Patent
Utility
US 5,931,631 · App. 09/083,834
Method and apparatus for vertical transfer of a semiconductor wafer cassette
Inventors:
Anthony C. Bonora, Michael A. Neads, Joshua T. Oen
Patented Case
View Patent ↗
Granted: Aug 3, 1999
Filed: May 22, 1998
Inventors
Anthony C. Bonora
Michael A. Neads
Joshua T. Oen
Assignee (at issue)
Asyst Technologies L.L.C.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.