Granted Patent
Utility
US 6,120,371 · App. 09/176,476
Docking and environmental purging system for integrated circuit wafer transport assemblies
Inventors:
Glenn A. Roberson, Jr., Robert M. Genco, G. Kyle Mundt
Patented Case
View Patent ↗
Granted: Sep 19, 2000
Filed: Oct 21, 1998
Inventors
Glenn A. Roberson, Jr.
Robert M. Genco
G. Kyle Mundt
Assignee (at issue)
Semifab Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.