Granted Patent B2

US 6,974,782 · App. 10/635,231 · Granted Dec 13, 2005

Abstract

Claims (13)

1. A reticle assembly comprising:

a reticle including a reticle plate;

a pellicle mounted to the reticle plate by a pellicle frame; and

a radio frequency device mounted to the pellicle frame for providing information regarding the reticle to a reader by radio frequency.

2. The reticle assembly of claim 1 in which the radio frequency device can be removed with the pellicle frame when the reticle is cleaned.

3. A container assembly comprising:

a container; and

at least one reticle assembly positioned within the container, the reticle assembly including a reticle plate, a pellicle mounted to the reticle plate by a pellicle frame, and a radio frequency device mounted to the pellicle frame for providing information regarding the reticle to a reader positioned externally to the container by radio frequency.

4. A method of tracking a reticle, the reticle having a reticle plate, the method comprising:

mounting a pellicle to the reticle plate by a pellicle frame;

mounting a radio frequency device to the pellicle frame; and

reading information regarding the reticle from the radio frequency device with a reader by radio frequency.

5. The method of claim 4 further comprising reading the reticle while the reticle is enclosed within a container.

Assignments (7)