Narrow width loadport mechanism for cleanroom material transfer systems
View Patent ↗A system and method of transporting substrates includes a loadport system including a frame, an articulating arm, a mini environment and a tower substantially centered in the frame. The tower includes multiple motors, a first motor mechanically coupled to the mini environment for moving the mini environment vertically. A second motors mechanically coupled to the articulating arm for moving the articulating arm vertically. A tower enclosure is also included. The tower enclosure enclosing the motors separate from the mini environment.
1. A loadport comprising:
a frame;
an articulating arm;
a mini environment; and
a tower enclosure disposed below a port plate, within the mini environment, the tower enclosure including:
a plurality of motors, a first one of the plurality of motors mechanically coupled to the mini environment for moving the mini environment vertically, a second one of the plurality of motors mechanically coupled to the articulating arm for moving the articulating arm; and
the tower enclosure isolating the plurality of motors from the mini environment, wherein the tower enclosure includes a system for preventing air flow from inside the tower enclosure and into the mini environment, the system for preventing air flow including a second fan for drawing air out of the mini environment, into the tower enclosure and to an environment external from the loadport, the second fan configured to draw air in a vertical direction toward a bottom of the loadport.
2. The system of claim 1 , wherein the plurality of motors are disposed between the mini environment and a base plate of the loadport, the base plate coupled to the frame.
3. The system of claim 1 , wherein the mini environment includes a filter assembly and a first fan coupled to the filter assembly for directing filtered air though the filter assembly and into the mini environment.
4. The system of claim 1 , wherein the second fan draws air through the second fan and out of the tower enclosure in a downward direction.
5. The system of claim 1 , wherein an inner volume of the mini environment is a class 1 cleanliness environment.
6. The system of claim 1 , wherein the plurality of motors include a third one of the plurality of motors mechanically coupled to the articulating arm for moving the articulating arm horizontally away from the frame and toward a process tool.
7. The system of claim 1 , wherein articulating arm includes a gripper assembly.
8. The system of claim 7 , wherein the gripper assembly includes a rotating gripper.
9. The system of claim 1 , wherein the loadport has a width functionally equal to a width of a substrate cassette location in a process tool.
10. A substrate transport system comprising:
a plurality of loadports coupled to a process tool, the process tool having a plurality of substrate cassette locations, each one of the plurality of loadports includes:
a frame;
an articulating arm;
a mini environment;
a tower enclosure below the port plate, within the mini environment, the tower including:
a plurality of motors, a first one of the plurality of motors mechanically coupled to the mini environment for moving the mini environment vertically, a second one of the plurality of motors mechanically coupled to the articulating arm assembly for moving the articulating arm assembly; and
the tower enclosure isolating the plurality of motors from the mini environment, wherein the tower enclosure includes a system for preventing air flow from inside the tower enclosure and into the mini environment, the system for preventing air flow including a second fan for drawing air out of the mini environment, into the tower enclosure and to an environment external from the loadport, the second fan configured to draw air in a vertical direction toward a bottom of the loadport;
wherein each one of the plurality of loadports is aligned with a corresponding one of the plurality of the substrate cassette locations in the process tool.
11. The system of claim 10 , wherein each one of the loadports has a width substantially equal to a width of one of the plurality of substrate cassette locations.
12. The system of claim 1 , wherein the tower enclosure reduces a volume of the mini environment.
13. The system of claim 1 , wherein the tower enclosure is substantially aligned with a center line of the loadport.
14. The system of claim 10 , wherein the tower enclosure reduces a volume of the mini environment.
15. The system of claim 10 , wherein the tower enclosure is substantially aligned with a center line of the loadport.
16. A loadport comprising:
a frame;
an articulating arm;
a mini environment;
a tower enclosure disposed below a port plate, within the mini environment, the tower enclosure including:
a plurality of motors, a first one of the plurality of motors mechanically coupled to the mini environment for moving the mini environment vertically, a second one of the plurality of motors mechanically coupled to the articulating arm for moving the articulating arm;
the tower enclosure isolating the plurality of motors from the mini environment, wherein the tower enclosure includes a system for preventing air flow from inside the tower enclosure and into the mini environment, the system for preventing air flow including a second fan for drawing air out of the mini environment, into the tower enclosure and to an environment external from the loadport, the second fan configured to draw air in a vertical direction toward a bottom of the loadport.
17. The system of claim 16 , further comprising an air outlet disposed near a bottom portion of the tower enclosure.
18. The system of claim 16 , wherein the tower enclosure is substantially aligned with a center line of the loadport.