Semiconductor manufacturing process modules
View Patent ↗A method is provided. The method includes disposing a plurality of robotic facilities to form a semiconductor handling system, controlling the semiconductor handling system with a controller to handoff a workpiece between neighboring robotic facilities, and providing a software interface for the controller, wherein the software interface permits a user to view alternate configurations of the handling system in order to optimize a characteristic of the handling system.
1. A method comprising:
disposing a plurality of robotic facilities to form a semiconductor handling system;
controlling the semiconductor handling system with a controller to handoff a workpiece between neighboring robotic facilities; and
providing a software interface for the controller, wherein the software interface permits a user to view a linking of components and view differences between alternate placement configurations of the linking of the components, robotic arms and process modules within the handling system in order to optimize a characteristic of the handling system.
2. The method of claim 1 , further including adding at least one of a semiconductor processing module and a wafer handling robotic facility to the semiconductor handling system without reconfiguring existing modules.
3. The method of claim 1 , further including configuring the plurality of robotic handling facilities to facilitate sequential processing of a workpiece by a first robot handing off the workpiece to a second robot between two sequential processes.
4. The method of claim 1 , further including detecting a module that is connected to the vacuum handling system and causing control software associated with the connected module to be operationally linked to the system control software.
5. The method of claim 1 , further including detecting an orientation of the workpiece to ensure a placement of the workpiece complies with an alignment requirement.
6. The method of claim 1 , further including providing a module connected to the semiconductor handling system that includes wafer storage features that are accessible by at least one robotic handling facility.
7. The method of claim 1 , further providing at least two workpiece handling robots in at least two workpiece processing planes, the robots capable of handing workpieces between the at least two planes.
8. The method of claim 1 , wherein the semiconductor handling system includes at least two different wafer processing modules for performing a process, the process selected from a list consisting of chemical vapor deposition, physical vapor deposition, etching, plasma processing, lithography, plating, cleaning, and spin coating.
9. A system comprising:
a plurality of robotic facilities configured to form a semiconductor handling system, wherein each of the plurality of robotic facilities includes at least one robot for handling a workpiece, the plurality of robot facilities configured to handoff the workpiece between neighboring robots; and
a software interface for a controller of the handling system, wherein the software interface permits a user to view a linking of components and view differences between alternate placement configurations of the linking of the components, robotic arms and process modules within the handling system in order to optimize a characteristic of the handling system.
10. The system of claim 9 , wherein at least one of a semiconductor processing module and a wafer handling robotic facility can be added to the semiconductor handling system without reconfiguring existing modules.
11. The system of claim 9 , wherein the plurality of robotic handling facilities is configured to facilitate sequential processing of a workpiece by a first robot handing off the workpiece to a second robot between two sequential processes.
12. The system of claim 9 , further including module control software that is operationally linked to the vacuum system software controller when a connection between a module and the vacuum system is detected.
13. The system of claim 9 , wherein an orientation of the workpiece is detected and the detected orientation is used to ensure a placement of the workpiece complies with an alignment requirement.
14. The system of claim 9 , further including a module connected to the semiconductor handling system that includes wafer storage features that are accessible by at least one robotic handling facility.
15. The system of claim 9 , the semiconductor handling system further including at least two workpiece handling robots in at least two workpiece processing planes, the robots capable of handing workpieces between the at least two planes.
16. The system of claim 9 , wherein the semiconductor handling system includes at least two different wafer processing modules for performing a process, the process selected from a list consisting of chemical vapor deposition, physical vapor deposition, etching, plasma processing, lithography, plating, cleaning, and spin coating.
17. A system comprising:
a configurable vacuum robotic wafer handling facility that includes an interior accessible through a plurality of entrances;
two sensors for each one of the plurality of entrances disposed in the interior, each sensor capable of detecting a presence of a wafer at a predetermined location within the interior, wherein the sensors are arranged so that at least two of the sensors detect the wafer for any position of the wafer entirely within the interior;
a controller for the handling facility; and
a software interface for the controller for permitting a user to view a linking of components and view differences between alternate placement configurations of the linking of the components, robotic arms and process modules within the handling facility in order to optimize a characteristic of the handling facility.
18. The system, of claim 17 , wherein at least one of a semiconductor processing module and a wafer handling robotic facility can be added to the semiconductor handling system without reconfiguring existing modules.
19. The system of claim 17 , wherein the plurality of robotic handling facilities is configured to facilitate sequential processing of a workpiece by a first robot handing off the workpiece to a second robot between two sequential processes.
20. The system of claim 17 , further including module control software that is operationally linked to the semiconductor handling system software controller when a connection between a module and the vacuum system is detected.