Patent Assignment
Reel/Frame 029134/0283
Bill of Sale
Recorded: 2012-10-16
Pages: 16
Assignor
BLUESHIFT TECHNOLOGIES, INC.
Executed: 2010-01-27
Assignee
BROOKS AUTOMATION, INC.
15 ELIZABETH DRIVE, CHELMSFORD, MASSACHUSETTS, 01824
Covered Properties
(43)
Methods and Systems for Handling a Workpiece in Vacuum-Based Material Handling System
Mid-Entry Load Lock for Semiconductor Handling System
Stacked Process Modules for a Semiconductor Handling System
Linear Semiconductor Processing Facilities
Bypass Thermal Adjuster for Vacuum Semiconductor Processing
Wafer Center Finding
Linear Semiconductor Processing Facilities
Semiconductor Manufacturing Process Modules
Semiconductor Manufacturing Process Modules
Semiconductor Manufacturing Process Modules
Semiconductor Manufacturing Process Modules
Semiconductor Manufacturing Process Modules
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Application:
11/877,170 →
Publication:
US 2008/0155444
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Methods and Systems for Controlling a Semiconductor Fabrication Process
Application:
11/877,264 →
Publication:
US 2008/0163096
Methods and Systems for Controlling a Semiconductor Fabrication Process
Semiconductor Wafer Handling and Transport
Semiconductor Wafer Handling and Transport
Semiconductor Wafer Handling and Transport
Batch Wafer Alignment
Wafer Center Finding
Wafer Center Finding with Charge-Coupled Devices
Applications of Neural Networks
Batch Substrate Handling
Vacuum Substrate Storage
Wafer Presence Detector with End Effectors Having Optical Couplers and Fibers
Stacked Process Modules for a Semiconductor Handling System
Semiconductor Manufacturing Systems
Mid-Entry Load Lock for Semiconductor Handling System
Substrate Container Sealing via Movable Magnets
Linear Semiconductor Processing Facilities
Semiconductor Manufacturing Systems
Stacked Process Modules for a Semiconductor Handling System
Semiconductor Manufacturing Process Module
Wafer Center Finding with Kalman Filter
Related Assignments
(8)
Other recorded transfers of the patents in this record — the chain of ownership.
Security Agreement
May 31, 2016
From: BROOKS AUTOMATION, INC.; BIOSTORAGE TECHNOLOGIES
To: WELLS FARGO BANK, NATIONAL ASSOCIATION
Reel/Frame 038891/0765 →
Security Interest
Oct 6, 2017
From: BROOKS AUTOMATION, INC.; BIOSTORAGE TECHNOLOGIES, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 044142/0258 →
Assignment of Assignor's Interest
Dec 9, 2021
From: BROOKS AUTOMATION HOLDING, LLC
To: BROOKS AUTOMATION US, LLC
Reel/Frame 058482/0001 →
Assignment of Assignor's Interest
Dec 9, 2021
From: BROOKS AUTOMATION,INC
To: BROOKS AUTOMATION HOLDING, LLC
Reel/Frame 058481/0740 →
Second Lien Patent Security Agreement
Feb 2, 2022
From: BROOKS AUTOMATION US, LLC
To: GOLDMAN SACHS BANK USA
Reel/Frame 058945/0748 →
First Lien Patent Security Agreement
Feb 2, 2022
From: BROOKS AUTOMATION US, LLC
To: BARCLAYS BANK PLC
Reel/Frame 058950/0146 →
Release of Security Interest Recorded at Reel/Frame 044142/0258
Nov 4, 2025
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: AZENTA, INC. (F/K/A BROOKS AUTOMATION, INC.); AZENTA US, INC. (F/K/A BROOKS LIFE SCIENCES, INC., F/K/A BIOSTORAGE TECHNOLOGIES, INC.)
Reel/Frame 073514/0609 →
Release of Security Interest Recorded at Reel/Frame 038891/0765
Nov 4, 2025
From: WELLS FARGO BANK, NATIONAL ASSOCIATION
To: AZENTA, INC. (F/K/A BROOKS AUTOMATION, INC.); AZENTA USA, INC. (F/K/A BIOSTORAGE TECHNOLOGIES, INC.)
Reel/Frame 073446/0080 →