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App. No. 11/877,264 · Confirmation No. 7613

METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2012-04-05 LET. Miscellaneous Incoming Letter 2 View
2012-04-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-04-05 ABN Abandonment 2 View
2010-03-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2010-03-29 SPEC Specification 1 View
2010-03-29 CLM Claims 5 View
2010-03-29 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2010-03-29 WFEE Fee Worksheet (SB06) 2 View
2010-03-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-03-29 WFEE Fee Worksheet (SB06) 1 View
2009-09-29 CTNF Non-Final Rejection 19 View
2009-09-29 892 List of references cited by examiner 1 View
2009-09-29 FWCLM Index of Claims 1 View
2009-09-29 SRFW Search information including classification, databases and other search related notes 1 View
2009-09-29 SRNT Examiner's search strategy and results 8 View
2009-09-29 SRNT Examiner's search strategy and results 2 View
2009-09-29 BIB Bibliographic Data Sheet 1 View
2009-07-24 SRNT Examiner's search strategy and results 1 View
2008-10-30 A.PE Preliminary Amendment 1 View
2008-10-30 CLM Claims 3 View
2008-10-30 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2008-10-30 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-07-03 NTC.PUB Notice of Publication 1 View
2008-03-24 APP.FILE.REC Filing Receipt 3 View
2008-03-14 A.PE Preliminary Amendment 1 View
2008-03-14 XT/ Extension of Time 1 View
2008-03-14 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2008-03-14 WFEE Fee Worksheet (SB06) 2 View
2008-03-14 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-03-14 OATH Oath or Declaration filed 9 View
2008-03-14 DRW Drawings-only black and white line drawings 13 View
2008-03-14 WFEE Fee Worksheet (SB06) 1 View
2007-11-14 NTC.MISS.PRT Notice to File Missing Parts 2 View
2007-11-14 APP.FILE.REC Filing Receipt 3 View
2007-10-23 ADS Application Data Sheet 5 View
2007-10-23 DRW Drawings-only black and white line drawings 13 View
2007-10-23 SPEC Specification 40 View
2007-10-23 CLM Claims 1 View
2007-10-23 ABST Abstract 1 View
2007-10-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-10-23 WFEE Fee Worksheet (SB06) 1 View
1930-10-30 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
11/877,264
Filed
2007-10-23
Pub. No.
US20080163096A1
Art Unit
2121