Granted Patent B2

US 9,752,615 · App. 11/769,651 · Granted Sep 5, 2017

Abstract

Claims (107)

1. A method of commutating a motor comprising:

operatively interfacing a stator and actuated component of the motor;

arranging at least two single circuit winding sets relative to the actuated component; and

independently controlling each of the at least two single circuit winding sets so that with more than one but no more than two of the at least two single circuit winding sets, driving forces of the actuated component and centering forces of the actuated component are controlled independently of each other, wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component.

2. The method of claim 1 , further comprising:

arranging at least three single circuit winding sets relative to the actuated component; and

independently controlling the at least three winding sets so that with more than one but no more than two of the at least three winding sets the actuated component is both independently driven and independently centered.

3. The method of claim 1 further comprising:

arranging each of the at least two single circuit winding sets as a pair of winding subsets; and

offsetting winding subsets within each pair of winding subsets so that one winding subset of the pair produces a radial force and the other winding subset produces a tangential force on the actuated component.

4. The method of claim 3 , comprising offsetting the winding subset within each pair of winding subsets by 90 electrical degrees.

5. An apparatus for commutating a motor comprising:

at least two single circuit winding sets arranged relative to an actuated component of the motor; and

commutation circuitry operable to independently control each of the at least two single circuit winding sets so that with more than one but no more than two of the at least two single circuit winding sets the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other, wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component.

6. The apparatus of claim 5 , further comprising:

at least three single circuit winding sets arranged relative to the actuated component; and

commutation circuitry operable to independently control the at least three winding sets so that with more than one but no more than two of the at least three winding sets the actuated component is both independently driven and independently centered.

7. The apparatus of claim 5 , wherein:

each of the at least two single circuit winding sets comprise a pair of winding subsets; and

winding subsets within each pair of winding subsets are offset so that one winding subset of the pair produces a radial force and the other winding subset produces a tangential force.

8. The apparatus of claim 7 , wherein the winding subsets within each pair of winding subsets are offset by 90 electrical degrees.

9. A motor comprising:

a stator having at least two independently controlled single circuit winding sets;

an actuated component operatively interfacing the stator; and

a controller communicatively connected to the at least two single circuit winding sets for controlling each of the at least two single circuit winding sets so that the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other,

wherein the at least two single circuit winding sets are arranged relative to the actuated component and the controller is programmed to control the at least two single circuit winding sets so that with more than one but no more than two of the at least two single circuit winding sets the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other, and wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component.

10. The motor of claim 9 , wherein:

the stator includes at least three independently controlled single circuit winding set;

the controller is communicatively connected to the at least three winding sets, and

the at least three winding sets are arranged relative to the actuated component and the controller is programmed to control the at least three winding sets so that with more than one but no more than two of the at least three winding sets the actuated component is both independently driven and independently centered.

11. The motor of claim 9 , wherein:

each of the at least two independently controlled single circuit winding sets include a pair of winding subsets; and

winding subsets within each pair of winding subsets are offset so that one winding subset of the pair produces a radial force and the other winding subset produces a tangential force.

12. The motor of claim 11 , wherein the winding subsets within each pair of winding subsets are offset by 90 electrical degrees.

13. A substrate processing apparatus comprising:

a motor including:

a stator having at least two independently controlled single circuit winding sets;

an actuated component operatively interfacing the stator; and

a controller communicatively connected to each of the at least two single circuit winding sets for controlling the at least two single circuit winding sets so that the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other,

wherein the at least two single circuit winding sets are arranged relative to the actuated component and the controller is programmed to control the at least two single circuit winding sets so that with more than one but no more than two of the at least two single circuit winding sets, the driving forces of the actuated component and the centering forces of the actuated component are controlled independently of each other, and wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component.

14. The substrate processing apparatus of claim 13 , wherein:

the stator comprises at least three independently controlled single circuit winding sets;

the controller is communicatively connected to the at least three winding sets, and

the at least three winding sets are arranged relative to the actuated component and the controller is programmed to control the at least three winding sets so that with more than one but no more than two of the at least three winding sets the actuated component is both independently driven and independently centered.

15. The substrate processing apparatus of claim 13 , wherein:

each of the at least two independently controlled single circuit winding sets include a pair of winding subsets; and

winding subsets within each pair of winding subsets are offset so that one winding subset of the pair produces a radial force and the other winding subset produces a tangential force.

16. The substrate processing apparatus of claim 15 , wherein the winding subsets within each pair of winding subsets are offset by 90 electrical degrees.

17. A method of commutating a motor comprising:

calculating an electrical angle offset to produce at least a one dimensional force in a common set of commutation equations; and

applying the electrical angle offset to an electrical angle in the common set of commutation equations such that the electrical angle offset in combination with the electrical angle operate to independently torque and independently center a rotor of the motor so that the rotor is actively centered with more than one but no more than two single circuit motor winding sets, wherein each individual single circuit winding set of the more than one but no more than two single circuit motor winding sets produce both the driving forces of the actuated component and the centering forces of the actuated component.

18. The method of claim 17 , further comprising utilizing a winding phase current in combination with the electrical angle offset in the common set of commutation equations.

19. The method of claim 17 , further comprising applying the electrical angle offset to the electrical angle in the common set of commutation equations to independently torque and independently center the rotor of the motor so that the rotor is actively centered with more than one but no more than two of at least three motor winding sets.

20. The method of claim 17 , further comprising applying the electrical angle offset to the electrical angle in the common set of commutation equations to independently torque and independently center the rotor of the motor so that the rotor is actively centered with more than one but no more than two of at least four motor winding sets.

21. The method of claim 17 , further comprising applying the electrical angle offset to the electrical angle in the common set of commutation equations to independently torque and independently center the rotor using Lorentz forces.

22. The method of claim 17 , further comprising applying the electrical angle offset to the electrical angle in the common set of commutation equations to independently torque and independently center the rotor using Maxwell forces.

23. The method of claim 17 , further comprising applying the electrical angle offset to the electrical angle in the common set of commutation equations to independently torque and independently center the rotor using a combination of Lorentz and Maxwell forces.

24. A method of commutating a motor comprising:

calculating an electrical angle offset to produce at least a one dimensional force in commutation equations for commutating the motor; and

applying the electrical angle offset to an electrical angle in the commutation equations such that the electrical angle offset in combination with the electrical angle operate to independently torque and independently center a rotor of the motor so that the rotor is actively centered with more than one but no more than two single circuit motor winding sets, wherein each individual single circuit winding set of the more than one but no more than two single circuit motor winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component.

25. The method of claim 24 , further comprising applying the electrical angle offset to the electrical angle in the commutation equations to independently torque and independently center a rotor of the motor so that the rotor is actively centered with more than one but no more than two of at least three motor winding sets.

26. The method of claim 24 , further comprising applying the electrical angle offset to the electrical angle in the commutation equations to independently torque and independently center a rotor of the motor so that the rotor is actively centered with more than one but no more than two of at least four of the motors winding sets.

27. The method of claim 24 , further comprising applying the electrical angle offset to the electrical angle so that the independent torque and independent active centering forces in the motor include Lorentz forces.

28. The method of claim 24 , further comprising applying the electrical angle offset to the electrical angle so that the independent torque and independent active centering forces in the motor include Maxwell forces.

29. The method of claim 24 , further comprising applying the electrical angle offset to the electrical angle so that the independent torque and independent active centering forces in the motor include a combination of Lorentz and Maxwell forces.

30. An apparatus for commutating a motor comprising:

circuitry for calculating an electrical angle offset to produce at least a one dimensional force in a common set of commutation equations; and

a current amplifier operable to apply the electrical angle offset to an electrical angle in the common set of commutation equations such that the electrical angle offset in combination with the electrical angle operate to cause the common set of commutation equations to independently produce torque and independently produce active centering forces using more than one but no more than two single circuit winding sets in motors with at least two winding sets and in motors with at least three winding sets, wherein each individual single circuit winding set of the more than but no more than two single circuit winding seta produces both the driving forces of the actuated component and the centering forces of the actuated component.

31. The apparatus of claim 30 , further comprising circuitry for utilizing a winding phase current in combination with the electrical angle offset in the common set of commutation equations.

32. The apparatus of claim 30 , wherein the current amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the common set of commutation equations is capable of controlling each individual winding set of the more than one but no more than two winding sets so that each individual winding set operates to produce both independent torque and independent active centering forces in motors with at least four winding sets.

33. The apparatus of claim 30 , wherein the current amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the independent torque and independent active centering forces in the motor include Lorentz forces.

34. The apparatus of claim 30 , wherein the current amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the independent torque and independent active centering forces in the motor include Maxwell forces.

35. The apparatus of claim 30 , wherein the current amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the independent torque and independent active centering forces in the motor include a combination of Lorentz and Maxwell forces.

36. A motor comprising:

a rotor; and

windings driven by a current amplifier, the current amplifier having:

circuitry for calculating an electrical angle offset to produce at least a one dimensional force in a common set of commutation equations; and

an amplifier operable to apply the electrical angle offset to an electrical angle in the common set of commutation equations such that the electrical angle offset in combination with the electrical angle operate to cause the common set of commutation equations to independently produce torque and independently produce active centering forces that are different from each other in the motor using more than one but no more than two single circuit winding sets, wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component, and wherein the motor is at least one of a two winding set motor or a three winding set motor.

37. The motor of claim 36 , wherein the current amplifier includes circuitry for utilizing a winding phase current in combination with the electrical angle offset in the common set of commutation equations.

38. The motor of claim 36 , wherein the amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the common set of commutation equations is capable of controlling each individual winding set of the more than one but no more than two winding sets so that each individual winding set operates to produce both independent torque and independent active centering forces that are different from each other in the motor, wherein the motor is at least a four winding set motor.

39. The motor of claim 36 , wherein the amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the independent torque and independent active centering forces in the motor include Lorentz forces.

40. The motor of claim 36 , wherein the amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the independent torque and independent active centering forces in the motor include Maxwell forces.

41. The motor of claim 36 , wherein the amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the independent torque and independent active centering forces in the motor include a combination of Lorentz and Maxwell forces.

42. A substrate processing apparatus comprising:

a controller for commutating a motor including:

circuitry for calculating an electrical angle offset to produce at least a one dimensional force in a common set of commutation equations; and

a current amplifier operable to apply the electrical angle offset to an electrical angle in the common set of commutation equations such that the electrical angle offset in combination with the electrical angle operate to cause the common set of commutation equations to produce both independent torque and independent active centering forces that are different from each other in the motor using more than one but no more than two single circuit winding sets, wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component, and wherein the motor is at least one of a two winding set motor or a three winding set motor.

43. The substrate processing apparatus of claim 42 , further comprising circuitry for utilizing a winding phase current in combination with the electrical angle offset in the common set of commutation equations.

44. The substrate processing apparatus of claim 42 , wherein the current amplifier is operable to apply the electrical angle offset to an electrical angle in the common set of commutation equations so that the common set of commutation equations is capable of controlling each individual winding set of the more than one but no more than two winding sets so that each individual winding set operates to produce both independent torque and independent active centering forces that are different from each other in the motor, wherein the motor is at least a four winding set motor.

45. The substrate processing apparatus of claim 42 , wherein the current amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the independent torque and independent active centering forces in the motor include Lorentz forces.

46. The substrate processing apparatus of claim 42 , wherein the current amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the independent torque and independent active centering forces in the motor include Maxwell forces.

47. The substrate processing apparatus of claim 42 , wherein the current amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the independent torque and independent active centering forces in the motor include a combination of Lorentz and Maxwell forces.

48. A substrate processing apparatus comprising:

a motor including:

a rotor; and

windings driven by a current amplifier, the current amplifier having:

circuitry for calculating an electrical angle offset to produce at least a one dimensional force in a common set of commutation equations; and

an amplifier operable to apply the electrical angle offset to an electrical angle in the common set of commutation equations such that the electrical angle offset in combination with the electrical angle operate to cause the common set of commutation equations to independently produce torque and independently produce active centering forces that are different from each other in the motor using more than one but no more than two single circuit winding sets, wherein each individual single circuit winding set of the more than one but no more than two single circuit winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component, and wherein the motor is at least one of a two winding set motor or a three winding set motor.

49. The substrate processing apparatus of claim 48 , wherein the current amplifier includes circuitry for utilizing a winding phase current in combination with the electrical angle offset in the common set of commutation equations.

50. The substrate processing apparatus of claim 48 , wherein the amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the common set of commutation equations is capable of controlling each individual winding set of the more than one but no more than two winding sets so that each individual winding set operates to produce both independent torque and independent active centering forces that are different from each other in the motor, wherein the motor is a four winding set motor.

51. The substrate processing apparatus of claim 48 , wherein the current amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the independent torque and independent active centering forces in the motor include Lorentz forces.

52. The substrate processing apparatus of claim 48 , wherein the current amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the independent torque and independent active centering forces in the motor include Maxwell forces.

53. The substrate processing apparatus of claim 48 , wherein the current amplifier is operable to apply the electrical angle offset to the electrical angle in the common set of commutation equations so that the independent torque and independent active centering forces in the motor include a combination of Lorentz and Maxwell forces.

54. A method of commutating a motor comprising:

operatively interfacing a stator and actuated component of the motor;

arranging at least two single circuit winding sets relative to the actuated component; and

independently controlling each of the at least two single circuit winding sets so that with a minimum of two of the at least two winding sets, driving forces of the actuated component and centering forces of the actuated component are controlled independently of each other, wherein each individual single circuit winding set of the minimum two winding sets produces both the driving forces of the actuated component and the centering forces of the actuated component so that the actuated component is independently driven and independently centered by the minimum two single circuit winding sets.

Assignments (9)