MULTI-FUNCTION VACUUM LINK
Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.
1 . A device for use in a semiconductor manufacturing process, the device comprising:
a robotic arm in a first chamber; and
a multi-function chamber including a first opening coupled to the first chamber in a vacuum-sealed connection, a second opening shaped and sized for connection to a second chamber in a vacuum-sealed connection, a plurality of shelves adapted to hold two or more wafers, and hardware for providing two or more of thermal control, metrology, alignment, testing, centering, marking, and mark reading.
2 . The device of claim 1 further comprising a robotic arm in the second chamber.
3 . The device of claim 2 wherein the second chamber is a cluster tool.
4 . The device of claim 2 wherein the second chamber is a process module.
5 . The device of claim 2 wherein the second chamber is connected to a second multi-function chamber.
6 . The device of claim 1 wherein the first chamber is supported on a substantially cylindrical pedestal that houses one or more robotic drive components for the robotic arm.
7 . The device of claim 1 further comprising an isolation valve at the first opening for selective isolation of the first chamber from the second chamber.
8 . The device of claim 1 further comprising an isolation valve at the second opening for selective isolation of the second chamber from a third chamber.
9 . The device of claim 1 wherein the plurality of shelves includes two or more vertically offset shelves.
10 . The device of claim 9 wherein the robotic arm includes vertical motion capability for accessing each one of the two or more vertically offset shelves.
11 . A method comprising:
coupling a first robotic arm chamber to a second robotic arm chamber through a multi-function chamber, each of the first robotic arm chamber, the second robotic arm chamber, and the multi-function chamber coupled in a vacuum-sealed connection;
providing a plurality of shelves within the multi-function chamber;
placing a wafer in the multi-function chamber; and
performing two or more of thermal control, metrology, alignment, testing, centering, marking, and mark reading on the wafer while it is in the multi-function chamber.
12 . The method of claim 11 wherein placing the wafer includes placing the wafer with a robotic arm in one of the first robotic arm chamber and the second robotic arm chamber.
13 . The method of claim 11 further comprising coupling the multi-function chamber to a cluster tool in a vacuum-sealed connection.
14 . The method of claim 11 further comprising coupling the multi-function chamber to a process module in a vacuum-sealed connection.
15 . The method of claim 11 further comprising coupling the multi-function chamber to a second multi-function chamber in a vacuum-sealed connection.
16 . The method of claim 11 further comprising supporting the first robotic arm chamber on a substantially cylindrical pedestal that houses one or more robotic drive components for a robotic arm in the robotic arm chamber.
17 . The method of claim 11 further comprising isolating the first robotic arm chamber from the multi-function chamber with an isolation valve.
18 . The method of claim 11 further comprising isolating the second robotic arm chamber from the multi-function chamber with an isolation valve.
19 . The method of claim 11 wherein the plurality of shelves includes two or more vertically offset shelves.
20 . The method of claim 19 further comprising moving the robotic arm vertically to access each one of the two or more vertically offset shelves.