Semiconductor stocker systems and methods
In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.
1. A stocker for storing multi-compartment workpieces, wherein the multi-compartment workpieces each comprise at least one compartment enclosing at least another compartment, the stocker comprising:
a first station, wherein the first station is operable to load or unload the multi-compartment workpieces;
a storage chamber, wherein the storage chamber comprises a plurality of storage compartments for storing the multi-compartment workpieces;
a second station, wherein the second station comprises a robot mechanism for transferring the multi-compartment workpieces between the first station and the storage chamber;
a compartment inerting system, wherein the compartment inerting system is coupled to an interior of the at least one compartment that encloses the at least another compartment of one of the multi-compartment workpieces stored in each storage compartment and configured so as to
inert an enclosing volume defined between the at least one compartment of the multi-compartment workpiece and the at least another compartment of the multi-compartment workpiece.
2. The stocker of claim 1 , wherein the compartment inerting system is distributed to one or more nozzles in each storage compartment of the storage chamber and wherein the one or more nozzles are configured to couple to the interior of the at least one compartment.
3. A stocker as in claim 2 , wherein the compartment inerting system delivers an inactive gas to the one or more nozzles with the interior of the at least one compartment coupled to the one or more nozzles.
4. A stocker as in claim 2 , further comprising a mechanism to deliver an inactive gas to the one or more nozzles when the interior of the at least one compartment is coupled to the one or more nozzles.
5. A stocker as in claim 2 , further comprising: a metering valve coupled to the one or more nozzles to control a flow rate of an inactive gas through the one or more nozzles.
6. A stocker as in claim 1 , further comprising: a flow mechanism for delivering a laminar flow to the plurality of storage compartments, wherein the laminar flow is provided from the top of the storage chamber.
7. A stocker as in claim 1 , further comprising: a flow mechanism for delivering a laminar flow to the plurality of storage compartments, wherein the laminar flow is provided from a side of each individual storage compartment.
8. A stocker as in claim 1 , further comprising: a circulation mechanism coupled to a raised floor of the storage chamber for circulating a flow within the storage chamber.
9. A stocker as in claim 1 , further comprising: a chiller for cooling a gas within the storage chamber.
10. A stocker for storing multi-compartment workpieces, wherein the multi-compartment workpieces each integrally comprise at least one compartment enclosing a volume and at least another compartment connected to the at least one compartment, the stocker comprising:
a first station, wherein the first station is operable to load or unload the multi-compartment workpieces;
a storage chamber, wherein the storage chamber comprises a plurality of storage compartments for storing the multi-compartment workpieces;
a second station, wherein the second station comprises a robot mechanism for transferring the multi-compartment workpieces between the first station and the storage chamber;
a compartment inerting system, wherein the compartment inerting system is coupled to an interior of the at least one compartment that encloses the volume of one of the multi-compartment workpieces stored in each storage compartment and configured so as to
inert the enclosed volume of the at least one compartment of the multi-compartment workpiece independent of the at least another compartment of the multi-compartment workpiece.
11. The stocker of claim 10 , wherein the compartment inerting system is distributed to one or more nozzles in each storage compartment of the storage chamber and wherein the one or more nozzles are configured to couple to the interior of the at least one compartment.
12. A stocker as in claim 11 , wherein the compartment inerting system delivers an inactive gas to the one or more nozzles with the interior of the at least one compartment coupled to the one or more nozzles.
13. A stocker as in claim 11 , further comprising a mechanism to deliver an inactive gas to the one or more nozzles when the interior of the at least one compartment is coupled to the one or more nozzles.
14. A stocker as in claim 11 , further comprising: a metering valve coupled to the one or more nozzles to control a flow rate of an inactive gas through the one or more nozzles.
15. A stocker as in claim 10 , further comprising: a flow mechanism for delivering a laminar flow to the plurality of storage compartments, wherein the laminar flow is provided from the top of the storage chamber.
16. A stocker as in claim 10 , further comprising: a flow mechanism for delivering a laminar flow to the plurality of storage compartments, wherein the laminar flow is provided from a side of each individual compartment.
17. A stocker as in claim 10 , further comprising: a circulation mechanism coupled to a raised floor of the storage chamber for circulating a flow within the storage chamber.
18. A stocker as in claim 10 , further comprising: a chiller for cooling a gas within the storage chamber.
19. The stocker of claim 10 , wherein the at least another compartment is enclosed within the at least one compartment of the multi-compartment workpiece.
20. A stocker for storing multi-compartment workpieces, wherein the multi-compartment workpieces each comprise at least one outer compartment and at least one inner compartment connected to the at least one outer compartment, the stocker comprising:
a first station, wherein the first station is operable to load or unload the multi-compartment workpieces;
a storage chamber, wherein the storage chamber comprises a plurality of storage compartments for storing the multi-compartment workpieces;
a second station, wherein the second station comprises a robot mechanism for transferring the multi-compartment workpieces between the first station and the storage chamber;
a compartment inerting system, wherein the compartment inerting system is distributed to one or more nozzles in each storage compartment of the storage chamber, wherein the one or more nozzles are configured to couple to an interior of the at least one outer compartment that encloses the at least one inner compartment of one of the multi-compartment workpieces stored in each storage compartment and configured so as to
inert an interior volume defined between the at least one outer compartment of the multi-compartment workpiece and the at least one inner compartment of the multi-compartment workpiece.
21. A stocker as in claim 20 , wherein the compartment inerting system delivers an inactive gas to the one or more nozzles with the interior of the at least one outer compartment coupled to the one or more nozzles.
22. A stocker as in claim 20 , further comprising a mechanism to deliver an inactive gas to the one or more nozzles when the interior of the at least one outer compartment is coupled to the one or more nozzles.
23. A stocker as in claim 20 , further comprising: a metering valve coupled to the one or more nozzles to control a flow rate of an inactive gas through the one or more nozzles.
24. A stocker as in claim 20 , further comprising: a flow mechanism for delivering a laminar flow to the plurality of storage compartments, wherein the laminar flow is provided from the top of the storage chamber.
25. A stocker as in claim 20 , further comprising: a flow mechanism for delivering a laminar flow to the plurality of storage compartments, wherein the laminar flow is provided from a side of each individual storage compartment.
26. A stocker as in claim 20 , further comprising: a circulation mechanism coupled to a raised floor of the storage chamber for circulating a flow within the storage chamber.
27. A stocker as in claim 20 , further comprising: a chiller for cooling a gas within the storage chamber.
28. The stocker of claim 20 , wherein the at least another compartment is enclosed in the at least one compartment of the multi-compartment workpiece.