IP Library Granted Patent US 9,889,558
Granted Patent B2
US 9,889,558 · App. 14/840,359 · Granted Feb 13, 2018

Redundantable robot assembly for workpiece transfer

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Quick Facts
Patent No.
US 9,889,558
App. No.
14/840,359
Granted
Feb 13, 2018
Kind
B2
Abstract

A redundantable robotic mechanism is disclosed for improving reliability of tranport equipment. The redundantable robot assembly typically comprises independent robots with separate controls, motors, linkage arms, or power, thus providing the capability of operation even if parts of the assembly are not operational or when parts of the assembly are removed for repair. The redundantable robot assembly can be also designed to allow in-situ servicing, e.g. servicing one robot when the other is running. The disclosed redundantable robot assembly provides virtual uninterrupted process flow, and thus greatly increases the yield for the manufacturing facility.

Claims (28)

1. A method comprising:

rotating a carousel stocker storage, wherein the carousel stocker storage is configured to support multiple workpieces, wherein the carousel stocker storage is rotated to present the multiple workpieces to a redundantable workpiece transfer mechanism having at least two independent workpiece transfer assemblies; and

transferring the multiple workpieces using each of the at least two independent workpiece transfer assemblies of the redundantable workpiece transfer mechanism, wherein each of the at least two independent workpiece transfer assemblies is configured so as to take over and effect workpiece transfer operations of another of the at least two independent workpiece transfer assemblies based on inoperability of the other of the at least two independent workpiece transfer assemblies.

2. The method of claim 1 further comprising establishing a service area by restricting the movements of each of the at least two independent workpiece transfer assemblies surrounding the other of the at least two independent workpiece transfer assemblies.

3. The method of claim 1 further comprising establishing a service area by moving the other of the at least two independent workpiece transfer assemblies outside the movement ranges of each of the at least two independent workpiece transfer assemblies.

4. The method of claim 3 wherein moving the other of the at least two independent workpiece assemblies comprises coupling the other of the at least two independent workpiece transfer assemblies to a hinged door, wherein the hinged door is operable to move the other of the at least two independent workpiece transfer assemblies to the service area.

5. The method of claim 1 further comprising transferring an inoperative one of the at least two independent workpiece transfer assemblies to a service area.

6. The method of claim 5 wherein transferring the inoperative one of the at least two independent workpiece assemblies comprises ejecting the inoperative one of the at least two independent workpiece transfer assemblies to the service area.

7. The method of claim 5 wherein transferring the inoperative one of the at least two independent workpiece assemblies comprises sliding the inoperative one of the at least two independent workpiece assemblies transfer assemblies to the service area.

8. The method of claim 1 further comprising moving at least one of the at least two independent workpiece transfer assemblies inside the movement ranges of the other or the at least two independent workpiece transfer assemblies.

9. The method of claim 1 further comprising moving the other of the at least two independent workpiece transfer assemblies outside the movement ranges of each of the at least two independent workpiece transfer assemblies.

10. The method of claim 1 further comprising coordinating the movements of each of the at least two independent workpiece transfer assemblies for noninterference of the other of the at least two independent workpiece transfer assemblies.

11. The method of claim 1 further comprising restricting the movements of each of the at least two independent workpiece transfer assemblies for noninterference of the other of the at least two independent workpiece transfer assemblies.

12. The method of claim 1 further comprising, with a computer processing unit,

sensing a malfunction of the other of the at least two independent workpiece transfer assemblies;

coordinating movement of the other of the at least two independent workpiece transfer assemblies to a serviceable area; and

coordinating or restricting each of the at least two independent workpiece transfer assemblies movement ranges for non-interference of the other of the at least two independent workpiece transfer assemblies.

13. A system comprising:

a carousel stocker storage, wherein the carousel stocker storage is configured to support multiple workpieces; and

a workpiece transfer mechanism having at least two independent workpiece transfer assemblies, each of the at least two independent workpiece transfer assemblies being configured so as to take over and effect workpiece transfer operations of another of the at least two independent workpiece transfer assemblies based on inoperability of the other of the at least two independent workpiece transfer assemblies,

wherein the at least two independent workpiece transfer assemblies are robot assemblies.

14. The system of claim 13 wherein the robot assemblies are at least one robot.

15. The system of claim 13 wherein the robot assemblies have at least two robots side by side.

16. The system of claim 13 wherein the robot assemblies have at least two robots vertically stacked.

17. The system of claim 13 wherein the robot assemblies act independently of each other.

18. The system of claim 13 wherein the robot assemblies have a plurality of articulate joint arms.

19. The system of claim 18 wherein the plurality of articulate joint arms extend, retract, raise, lower and rotate.

20. The system of claim 18 wherein the plurality of articulate joint arms house at least one mechanism.

Assignments (5)
CORRECTIVE ASSIGNMENT TO CORRECT THE RECEIVING PARTY DATA AND THE ASSIGNMENT DOCUMENT PREVIOUSLY RECORDED AT REEL: 057758 FRAME: 0384. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Feb 2, 2022
From: REBSTOCK, LUTZ
To: DYNAMIC MICRO SYSTEMS, SEMICONDUCTOR EQUIPMENT GMBH
Reel/Frame 059084/0337 →
SUBMISSION IS TO CORRECT AN ERROR MADE IN A PREVIOUSLY RECORDED DOCUMENT THAT ERRONEOUSLY AFFECTS THE IDENTIFIED APPLICATION(S), OR PATENT(S). Recorded Jan 19, 2022
From: BROOKS AUTOMATION (GERMANY) GMBH
To: BROOKS AUTOMATION (GERMANY) GMBH
Reel/Frame 058771/0795 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 9, 2021
From: BROOKS AUTOMATION,INC
To: BROOKS AUTOMATION HOLDING, LLC
Reel/Frame 058481/0740 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 9, 2021
From: BROOKS AUTOMATION HOLDING, LLC
To: BROOKS AUTOMATION US, LLC
Reel/Frame 058482/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 8, 2021
From: REBSTOCK, LUTZ
To: BROOKS CCS GMBH
Reel/Frame 057758/0384 →