Granted Patent
Utility
US 6,719,517 · App. 10/006,263
Substrate processing apparatus with independently configurable integral load locks
Inventors:
David Beaulieu, Douglas R. Adams, Mitchell Drew, Peter van der Meulen
Patented Case
View Patent ↗
Granted: Apr 13, 2004
Filed: Dec 4, 2001
Inventors
David Beaulieu
Douglas R. Adams
Mitchell Drew
Peter van der Meulen
Assignee (at issue)
Brooks Automation GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.