Substrate transport apparatus with active edge gripper
View Patent ↗A substrate transport apparatus comprising a drive mechanism, a movable arm assembly, and an end effector with an active edge gripper. The apparatus is configured to avoid the need to provide cables to the end effector for power or communication. In one aspect, the gripper is actuated when a motion sensor senses motion of the end effector. In another aspect, communication signals are wirelessly transferred to the end effector to control the active gripper. In another aspect, power is wirelessly transferred to the end effector to power actuation of the gripper.
1. A substrate processing apparatus comprising:
a chamber capable of holding an isolated atmosphere;
a drive mechanism connected to the chamber;
a movable arm assembly connected to the drive mechanism and mounted within the chamber, the movable arm assembly having an end effector, with a chuck, for holding a substrate, the chuck having a movable edge gripper with a contact surface, wherein an edge of the substrate is gripped by actuating the movable edge gripper to engage the substrate with the contact surface; and
a wireless communication device mounted to the movable arm assembly, the wireless communication device being operatively connected to the movable edge gripper and configured to effect actuation of the movable edge gripper in response to receiving a wireless signal inside the chamber from another wireless communication device.
2. The apparatus of claim 1 wherein the other wireless communication device is located outside the chamber, and the wireless communication device is located on the end effector.
3. The apparatus of claim 2 wherein power to actuate the movable edge gripper is wirelessly transmitted to the movable edge gripper.
4. The apparatus of claim 3 further comprising a controller communicably connected via the wireless communication device to the movable edge gripper for actuating the movable edge gripper, and wherein the controller is located outside the chamber.
5. The apparatus of claim 4 wherein the wireless communication device and the other wireless communication device are communicably coupled via BLUETOOTH® communication protocol.
6. The apparatus of claim 3 further comprising a power supply located on the movable arm assembly for powering movement of the movable edge gripper.
7. The apparatus of claim 3 further comprising a motion sensor for providing a signal to actuate the movable edge gripper, wherein the movable edge gripper is actuated in response to the motion sensor sensing motion of the end effector.
8. The apparatus of claim 3 further comprising a transport vehicle movably mounted in the chamber, the transport vehicle having a base, and wherein the drive mechanism is connected to the base.
9. A substrate processing apparatus comprising:
a chamber capable of holding an isolated atmosphere;
a drive mechanism connected to the chamber;
a movable arm assembly connected to the drive mechanism and mounted within the chamber, the movable arm assembly having an end effector with a chuck for holding a substrate, the chuck having a movable edge gripper with a contact surface, wherein an edge of the substrate is gripped by actuating the movable edge gripper to engage the substrate with the contact surface; and
a first wireless communication device mounted to the movable arm assembly and operably connected to the end effector wherein the first wireless communication device is configured to receive a wireless signal inside the chamber from another second wireless communication device and convert the wireless signal to power actuation of the movable edge gripper.
10. The apparatus of claim 9 wherein the first wireless communication device is located on the end effector, and wherein the wireless signal is an electromagnetic signal.
11. The apparatus of claim 9 wherein at least part of the second wireless communication device is located outside the chamber.
12. The apparatus of claim 9 further comprising a motion sensor for providing a signal to actuate the movable edge gripper, wherein the movable edge gripper is actuated in response to the motion sensor sensing motion of the end effector.
13. The apparatus of claim 9 further comprising a transport vehicle movably mounted in the chamber, the transport vehicle having a base, and wherein the drive mechanism is connected to the base.