Reduced capacity carrier, transport, load port, buffer system
A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
1 . An semiconductor workpiece processing system comprising:
at least one processing tool for processing semiconductor workpieces;
a primary transport system having one or more constant velocity transport loops;
a secondary transport system having one or more constant velocity transport loops, the secondary transport system being connected to the primary transport system through queue sections wherein, the queue sections are configured to allow the movement of material between the primary transport system and secondary transport system without disrupting the flow of either the primary or secondary transport systems; and
one or more interfaces connected to the one or more transport loops of the secondary transport system through interface shunts for interfacing with the at least one processing tool, wherein the interface shunts are configured to allow the movement of material between the one or more transport loops of the secondary transport system and the one or more interfaces without disrupting a flow of the secondary transport system;
wherein the flow of material along the primary and secondary transport systems is continuous.