Linear vacuum robot with z motion and articulated arm
View Patent ↗There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A linear transport chamber includes linear tracks and robot arms riding on the linear tracks to linearly transfer substrates along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers. A four-axis robot arm is disclosed, capable of linear translation, rotation and articulation, and z-motion.
1. A substrate transfer system, comprising:
an elongated vacuum chamber;
a linear track affixed inside the elongated vacuum chamber;
a first motor positioned outside the vacuum chamber and rotating a first magnetic driver;
a second motor positioned outside the vacuum chamber and rotating a second magnetic driver;
a robot arm assembly riding on the linear track and comprising:
a base configured for free riding on the linear track;
a linear motor imparting linear motion to the base;
a fixed arm coupled to the base;
an articulated arm rotatably coupled to the fixed arm;
a first magnetically-coupled follower assembly configured to magnetically follow rotation of the first magnetic driver to thereby rotate the articulated arm; and
a second magnetically-coupled follower assembly configured to magnetically follow rotation of the second magnetic driver; and,
an elevation mechanism coupled to and receiving rotational motion from the second magnetically-coupled follower assembly to thereby elevate the fixed arm;
wherein the first and second magnetically-coupled followers are configured to follow linear movement of a respective one of the first and second magnetic drivers to thereby drive the robot arm along the linear track.
2. The substrate transfer system in accordance with claim 1 , further comprising:
a first pulley coupled to the first magnetically-coupled follower assembly;
a second pulley coupled to the articulated arm; and,
a flexible endless band transferring rotational motion from the first pulley to the second pulley to thereby rotate the articulated arm.
3. The substrate transfer system in accordance with claim 1 , wherein the elevation mechanism comprises a lead screw.
4. The substrate transfer system in accordance with claim 2 , further comprising a spline shaft and wherein the first pulley is mounted onto the spline shaft.
5. The substrate transfer system in accordance with claim 1 , further comprising:
a robot arm section rotatably coupled to the articulated arm.
6. The substrate transfer system in accordance with claim 5 , further comprising:
a third motor positioned outside the vacuum chamber and rotating a third magnetic driver;
a third magnetically-coupled follower assembly configured to magnetically follow rotation of the third magnetic driver to thereby rotate the robot arm section.
7. The substrate transfer system in accordance with claim 6 , further comprising a pulley and endless band assembly transferring rotational motion of the third motor to rotate the robot arm section.
8. The substrate transfer system in accordance with claim 7 , further comprising a spline shaft and wherein at least one pulley of the pulley and endless band assembly is mounted onto the spline shaft.
9. The substrate transfer system in accordance with claim 1 , further comprising a vacuum partition between the first and second magnetic drivers and the first and second magnetic follower assemblies.
10. The substrate transfer system in accordance with claim 1 , wherein the first magnetic follower assembly further comprises reducing gears.
11. The substrate transfer system in accordance with claim 10 , wherein the second magnetic follower assembly further comprises reducing gears.
12. The substrate transfer system in accordance with claim 8 , wherein the first magnetic follower assembly further comprises reducing gears.
13. The substrate transfer system in accordance with claim 12 , wherein the second magnetic follower assembly further comprises reducing gears.
14. The substrate transfer system in accordance with claim 13 , wherein the third magnetic follower assembly further comprises reducing gears.
15. A substrate transfer system, comprising:
an elongated vacuum chamber;
a linear track affixed inside the elongated vacuum chamber;
a first motor positioned outside the vacuum chamber and rotating a first magnetic driver;
a second motor positioned outside the vacuum chamber and rotating a second magnetic driver;
a robot arm assembly riding on the linear track and comprising:
a base configured for free riding on the linear track;
a linear motor imparting linear motion to the base;
a fixed arm coupled to the base with a rigid coupling so that the fixed arm does not rotate;
an articulated arm rotatably coupled to the fixed arm;
an extension articulated arm rotatably coupled to the articulated arm;
a first magnetically-coupled follower assembly configured to magnetically follow rotation of the first magnetic driver to thereby rotate the articulated arm; and
a second magnetically-coupled follower assembly configured to magnetically follow rotation of the second magnetic driver to thereby rotate the extension articulated arm.
16. The substrate transfer system of claim 15 , further comprising a first pulley and endless band assembly transferring rotational motion form the first magnetically-coupled follower assembly to thereby rotate the articulated arm and a second pulley and endless band assembly transferring rotational motion form the second magnetically-coupled follower assembly to thereby rotate the extension articulated arm.
17. The substrate transfer system of claim 15 , further comprising:
a third motor positioned outside the vacuum chamber and rotating a third magnetic driver;
a third magnetically-coupled follower assembly configured to magnetically follow rotation of the third magnetic driver; and,
an elevation mechanism coupled to and receiving rotational motion from the third magnetically-coupled follower assembly to thereby elevate the fixed arm.
18. The substrate transfer system of claim 17 , wherein the elevation mechanism comprises a lead screw.
19. The substrate transfer system of claim 17 , wherein the first pulley and endless band assembly further comprises a spline shaft and a first pulley mounted onto the spline shaft.
20. The substrate transfer system of claim 17 , wherein at least one of the first, second and third magnetic follower assemblies comprises reducing gears.