IP Library › Patent Application 11876910
Patent Application
App. No. 11/876,910

SEMICONDUCTOR MANUFACTURING PROCESS MODULES

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Quick Facts
Patent No.
US None
App. No.
11/876,910
Abstract

A variety of process modules are described for use in semiconductor manufacturing processes.

Claims (5)

1 . A device comprising:

a single entry shaped and sized for passage of a single wafer;

an interior chamber adapted to hold a plurality of wafers in a side-by-side figuration;

a slot valve operable to selectively isolate the interior chamber; and

a tool for processing the plurality of wafers within the interior chamber.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 9, 2021
From: BROOKS AUTOMATION,INC
To: BROOKS AUTOMATION HOLDING, LLC
Reel/Frame 058481/0740 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 9, 2021
From: BROOKS AUTOMATION HOLDING, LLC
To: BROOKS AUTOMATION US, LLC
Reel/Frame 058482/0001 →