Load port module

1. A substrate loading device comprising:

a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the substrate loading device and the substrate processing apparatus;

a cassette support connected to the frame for holding at least one substrate cassette container for transfer of substrates to and from the at least one substrate cassette container through the transport opening; and

selectably variable cassette support purge ports each with a variable purge port nozzle, variable between more than one selectable predetermined purge port nozzle characteristics, disposed on the cassette support, each of the more than one purge port nozzle characteristics being configured so that the purge port nozzle with each selected predetermined purge port nozzle characteristic complements and couples to at least one purge port of the at least one substrate cassette container.

2. The substrate loading device of claim 1 , wherein the selectably variable cassette support purge ports have more than one purge port nozzle locations, and each selected predetermined purge port nozzle characteristic, of the purge ports, disposes each of the more than one purge port nozzle locations, corresponding to the selected nozzle characteristic, so that the purge port nozzle at each location complements and couples to the at least one purge port.

3. The substrate loading device of claim 2 , wherein the selectably variable cassette support purge ports include an interchangeable purge port nozzle module with at least one purge port nozzle, and being selectable from a number of different interchangeable purge port nozzle modules, each defining a corresponding one of the more than one predetermined nozzle characteristics.

4. The substrate loading device of claim 3 , wherein each of the corresponding one of the more than one predetermined nozzle characteristics determines different predetermined purge port nozzle configurations for modular mounting to a respective interchangeable purge port nozzle interface defined by the more than one selectable predetermined purge port nozzle characteristics, so that selectable mounting of the interchangeable purge port nozzle module varies the configuration of the selectably configurable cassette support purge ports from a first configuration with the purge port nozzle at purge port nozzle locations conformal with and effecting coupling with a first of the at least one substrate cassette container having a first predetermined purge port characteristic, to a second configuration with the purge port nozzle at purge port nozzle locations conformal with and effecting coupling with a second of the at least one substrate cassette container having a second predetermined purge port characteristic different that the first predetermined purge port characteristic.

5. The substrate loading device of claim 3 , wherein:

each of the more than one purge port nozzle locations defines an interchangeable purge port nozzle interface; and

the interchangeable purge port nozzle interface is disposed so as to have a predetermined position relative to a predetermined datum of the cassette support so that each purge port nozzle, of the different interchangeable purge port nozzle modules, mounted to the interchangeable purge nozzle interface is deterministically located with respect to a predetermined datum of each different substrate cassette container.

6. The substrate loading device of claim 3 , wherein:

each of the more than one purge port nozzle locations defines an interchangeable purge port nozzle interface; and

the interchangeable purge port nozzle interface is disposed so as to have a predetermined position relative to a predetermined datum of the cassette support so that selectable mounting of the interchangeable purge port nozzle module effects, substantially coincident with mounting, deterministic positioning of each purge port nozzle, of the interchangeable purge port nozzle module, mounted to the interchangeable purge nozzle interface with respect to a predetermined datum of each different substrate cassette container.

7. The substrate loading device of claim 3 , wherein:

each of the more than one purge port nozzle locations defines an interchangeable purge port nozzle interface; and

each of the interchangeable purge port nozzle interface is disposed so as to have a predetermined position relative to a predetermined datum of the cassette support so that each of the interchangeable purge port nozzle interface is deterministically located with respect to a predetermined datum of each different substrate cassette container.

8. The substrate loading device of claim 3 , wherein:

each of the more than one purge port nozzle locations defines an interchangeable purge port nozzle interface; and

each of the interchangeable purge port nozzle interfaces and the different predetermined purge nozzle outlet configurations of each respective one of the different interchangeable purge port nozzle modules are configured so as to effect fast swap mounting of each respective one of the different interchangeable purge port nozzle modules with another one of the different interchangeable purge port nozzle modules.

9. The substrate loading device of claim 3 , wherein:

each of the more than one purge port nozzle locations defines an interchangeable purge port nozzle interface; and

each of the interchangeable purge port nozzle interfaces defines a nozzle positioning datum deterministically representing each of the at least one purge port of the different substrate cassette containers having different purge port characteristics.

10. The substrate loading device of claim 3 , wherein:

each of the more than one purge port nozzle locations defines an interchangeable purge port nozzle interface; and

each purge port nozzle is removably mounted to the interchangeable purge port nozzle interface as a unit independent from another purge port nozzle of the interchangeable purge port nozzle module, and each independently mounted purge port nozzle, of the interchangeable purge port nozzle module, is independently interchanged with a different purge port nozzle of another different purge port nozzle module from the number of different purge port nozzle modules so as to effect interchange of the interchangeable purge port nozzle module with the other different purge port nozzle module.

11. The substrate loading device of claim 3 , wherein:

each of the more than one purge port nozzle locations defines an interchangeable purge port nozzle interface; and

each purge port nozzle is removably mounted to the interchangeable purge port nozzle interface as a unit independent from another purge port nozzle of the interchangeable purge port nozzle module, and the interchangeable purge port nozzle module is interchanged nozzle by nozzle with another of the different purge port nozzle modules with different corresponding purge port nozzles.

12. The substrate loading device of claim 3 , wherein:

each of the more than one purge port nozzle locations defines an interchangeable purge port nozzle interface; and

each different purge port nozzle module from the number of different purge port nozzle modules has a module frame with each corresponding purge port nozzle mounted to the module frame so that the module frame is common to each corresponding purge port nozzle, and the module frame defines a common removable mount coupling to the cassette support so that removably coupling the module frame to the cassette support effects mounting of each purge port nozzle to a respective purge port nozzle interface as a common module unit.

13. The substrate loading device of claim 12 , wherein the module frame of each different purge port nozzle module with the corresponding purge port nozzle thereon is interchangeable as a module unit with another module frame of each different purge port nozzle module from the number of different purge port nozzle modules with the corresponding different purge port nozzle thereon.

14. A method comprising:

providing a frame of a substrate loading device adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the substrate loading device and the substrate processing apparatus;

providing a cassette support connected to the frame for holding at least one substrate cassette container for transfer of substrates to and from the at least one substrate cassette container through the transport opening;

providing selectably configurable cassette support purge ports with more than one purge port nozzle locations disposed on the cassette support, each of the more than one purge port nozzle locations being configured so that a purge port nozzle at the purge port nozzle location couples to at least one purge port of the at least one substrate cassette container, wherein each purge port nozzle location defines an interchangeable purge port nozzle interface; and

selecting an interchangeable purge port nozzle module having at least one purge port nozzle from a number of different interchangeable purge port nozzle modules, each having different predetermined purge port nozzle configurations for modular mounting to the interchangeable purge port nozzle interface, so that selectable mounting of the interchangeable purge port nozzle module changes the configuration of the selectably configurable cassette support purge ports from a first configuration with the purge port nozzle at purge port nozzle locations conformal with and effecting coupling with a first of the at least one substrate cassette container having a first predetermined purge port characteristic, to a second configuration with the purge port nozzle at purge port nozzle locations conformal with and effecting coupling with a second of the at least one substrate cassette container having a second predetermined purge port characteristic different that the first predetermined purge port characteristic.

15. The method of claim 14 , wherein the interchangeable purge port nozzle interface is disposed so as to have a predetermined position relative to a predetermined datum of the cassette support so that each purge port nozzle, of the different interchangeable purge port nozzle modules, mounted to the interchangeable purge nozzle interface is deterministically located with respect to a predetermined datum of each different substrate cassette container.

16. The method of claim 14 , wherein the interchangeable purge port nozzle interface is disposed so as to have a predetermined position relative to a predetermined datum of the cassette support so that selectable mounting of the interchangeable purge port nozzle module effects, substantially coincident with mounting, deterministic positioning of each purge port nozzle, of the interchangeable purge port nozzle module, mounted to the interchangeable purge nozzle interface with respect to a predetermined datum of each different substrate cassette container.

17. The method of claim 14 , wherein each of the interchangeable purge port nozzle interface is disposed so as to have a predetermined position relative to a predetermined datum of the cassette support so that each of the interchangeable purge port nozzle interface is deterministically located with respect to a predetermined datum of each different substrate cassette container.

18. The method of claim 14 , further comprising effecting fast swap mounting of each respective one of the different interchangeable purge port nozzle modules with another one of the different interchangeable purge port nozzle modules.

19. The method of claim 14 , wherein each of the interchangeable purge port nozzle interfaces defines a nozzle positioning datum deterministically representing each of the at least one purge port of the a respective one of the at least one substrate cassette containers having different purge port characteristics.

20. The method of claim 14 , wherein each purge port nozzle is removably mounted to the interchangeable purge port nozzle interface as a unit independent from another purge port nozzle of the interchangeable purge port nozzle module, and each independently mounted purge port nozzle, of the interchangeable purge port nozzle module, is independently interchanged with a different purge port nozzle of another different purge port nozzle module from the number of different purge port nozzle modules so as to effect interchange of the interchangeable purge port nozzle module with the other different purge port nozzle module.