IP Library Granted Patent US 9,919,871
Granted Patent B2
US 9,919,871 · App. 14/497,324 · Granted Mar 20, 2018

Buffer station for stocker system

Inventor: Lutz Rebstock (Gaienhofen, DE)
Assignee: Brooks Automation (Germany) GmbH
B65G1/1371B65G1/12H01L21/67769
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Quick Facts
Patent No.
US 9,919,871
App. No.
14/497,324
Granted
Mar 20, 2018
Kind
B2
Abstract

A buffer station provides potential improvement for the operation of a facility. By storing to-be accessed workpieces in the buffer stations of an equipment, the operation of the facility is not interrupted when the equipment is down. The workpieces can be retrieved through emergency access port of the buffer station, thus ensure the continuous supply of workpieces for the workpiece flow of the facility. Algorithm for getting the needed workpieces to the buffer station is also provided through a controller or a computer mechanism. The buffer station can be incorporated in a stocker, such as wafer stocker or reticle stocker.

Claims (27)

1. A method for providing continuous operation in a facility, the method comprising:

storing a plurality of workpieces in a buffer station, wherein the buffer station is separate from a storage chamber that is communicably coupled to the buffer station, the storage chamber having a clean environment, wherein the buffer station includes a common housing having a bypass access and an IO station access, the bypass access being separate and distinct from the IO station access, and

accessing the plurality of workpieces, through the bypass access, where the bypass access provides an alternate egress pathway from the common housing, the alternate egress pathway being alternate to a different egress pathway from the common housing provided by the IO station access, so that the plurality of workpieces are accessed through the bypass access without exposing the plurality of workpieces in the clean environment of the storage chamber to an outside environment within the facility.

2. The method of claim 1 , further comprising determining another plurality of workpieces to be processed in a next predetermined period.

3. The method of claim 2 , wherein the next predetermined period is an average time to repair the equipment.

4. The method of claim 2 , wherein the next predetermined period is 24 hours.

5. The method of claim 1 , wherein the accessing is performed by an operator outside a stocker in the facility.

6. The method of claim 1 , wherein the buffer station is an IO station.

7. The method of claim 1 , wherein the plurality of workpieces are stored in a plurality of containers.

8. A method for providing continuous operation in a facility, the method comprising:

retrieving a plurality of workpieces that are queued to be processed;

storing the retrieved plurality of workpieces in a buffer station, wherein the buffer station is separate from a storage chamber that is communicably coupled to the buffer station, the storage chamber having a clean environment for holding the plurality of workpieces, wherein the buffer station includes a common housing having an external bypass access and an IO station access, the external bypass access being separate and distinct from the IO station access, and

accessing, through the external bypass access, where the external bypass access provides an alternate egress pathway from the common housing, the alternate egress pathway being alternate to a different egress pathway from the common housing provided by the IO station access, the plurality of workpieces, so that the plurality of workpieces are accessed through the external bypass access without exposing the plurality of workpieces in the clean environment of the storage chamber to an outside environment within the facility.

9. The method of claim 8 , further comprising moving the plurality of workpieces from the buffer station to a separate IO station.

10. The method of claim 9 , wherein the separate IO station comprises the IO station access to transfer the plurality of workpieces outside a stocker in the facility.

11. The method of claim 8 further comprising determining another plurality of workpieces to be processed in a next predetermined period.

12. The method of claim 11 , wherein the next predetermined period is 24 hours.

13. The method of claim 11 , wherein the next predetermined period is an average time to repair the equipment.

14. The method of claim 11 , wherein determining another plurality of workpieces is based on a workpiece flow operation.

15. The method of claim 8 , wherein the buffer station comprises a normal access for accessing the workpieces during normal operation of a stocker of the facility.

16. A non-transitory, machine readable medium comprising machine executable program instructions which, when executed by a data processing system, cause the data processing system to perform a method for improving continuous operation of a facility, the method comprising:

determining a plurality of workpieces to be removed from a stocker, including a storage chamber having a clean environment, for a next predetermined period, wherein the determined plurality of workpieces are stored in a buffer station that is communicably coupled to the storage chamber, wherein the buffer station includes a common housing having a bypass access and an IO station access, the bypass access being separate from the IO station access, and

accessing the plurality of workpieces, through the bypass access, where the bypass access provides an alternate egress pathway from the common housing, the alternate egress pathway being alternate to a different egress pathway from the common housing provided by the IO station access so that the plurality of workpieces are accessed through the bypass access and permitting removal of the plurality of workpieces in the buffer station without exposing the plurality of workpieces in the clean environment of the storage chamber to an outside environment within the facility.

17. The non-transitory medium of claim 16 , wherein the buffer station comprises a normal access for accessing the workpieces during normal operation of a stocker of the facility.

18. The non-transitory medium of claim 16 , wherein the next predetermined period is an average time to repair the equipment.

19. The non-transitory medium of claim 16 , wherein the next predetermined period is 24 hours.

20. The non-transitory medium of claim 16 , wherein the facility comprises at least one of a wafer stocker, a flat panel display stocker, and a reticle stocker.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 2, 2022
From: REBSTOCK, LUTZ
To: DYNAMIC MICRO SYSTEMS, SEMICONDUCTOR EQUIPMENT GMBH
Reel/Frame 058865/0944 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 9, 2021
From: BROOKS AUTOMATION,INC
To: BROOKS AUTOMATION HOLDING, LLC
Reel/Frame 058481/0740 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 9, 2021
From: BROOKS AUTOMATION HOLDING, LLC
To: BROOKS AUTOMATION US, LLC
Reel/Frame 058482/0001 →
Continuity (3)
Continuation 11881091 · Jul 25, 2007
Continuation 11881093 · Jul 25, 2007
Related Publication 20150012128A1 · Jan 8, 2015