Patent Assignment
Reel/Frame 013381/0611
Assignment of Assignor's Interest
Recorded: 2002-10-15
Pages: 13
Assignee
CYMER, INC.
16750 VIA DEL CAMPO COURT, LEGAL DEPT. MS/1-2A, SAN DIEGO, CALIFORNIA, 92127-1712
Covered Property
(1)
Control System for a Two Chamber Gas Discharge Laser