Granted Patent
Utility
US 6,690,704 · App. 10/210,761
Control system for a two chamber gas discharge laser
Inventors:
John P. Fallon, Richard L. Sandstrom, William N. Partlo, Alexander I. Ershov, Toshihiko Ishihara, John Meisner, Richard M. Ness, Paul C. Melcher, John Allen Rule, Robert N. Jacques
Patented Case
View Patent ↗
Granted: Feb 10, 2004
Filed: Jul 31, 2002
Inventors
John P. Fallon
Richard L. Sandstrom
William N. Partlo
Alexander I. Ershov
Toshihiko Ishihara
John Meisner
Richard M. Ness
Paul C. Melcher
John Allen Rule
Robert N. Jacques
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.